One-dimensional MEMS capacitive ultrasonic transducer arrays based on C-SOI technology

LI Yu-ping; HE Chang-de; ZHANG Juan-ting; ZHANG Hui; SONG Jin-long; XUE Chen-yang

doi:10.13873/j.1000-9787(2015)03-0094-03

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One-dimensional MEMS capacitive ultrasonic transducer arrays based on C-SOI technology

更新时间：2025-09-11

- One-dimensional MEMS capacitive ultrasonic transducer arrays based on C-SOI technology
- Vol. 34, Issue 3, Pages: 94-96+102(2015)
- 作者机构：
  
  1. 中北大学仪器科学与动态测试教育部重点实验室
  2. 中北大学电子测试技术国防科技重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2015)03-0094-03
  CLC： TP212
- Published：2015
- 稿件说明：
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[1]李玉平,何常德,张娟婷,张慧,宋金龙,薛晨阳.基于C-SOI工艺的一维MEMS电容式超声传感器阵列[J].传感器与微系统,2015,34(03):94-96+102.

LI Yu-ping, HE Chang-de, ZHANG Juan-ting, et al. One-dimensional MEMS capacitive ultrasonic transducer arrays based on C-SOI technology[J]. 2015, 34(3): 94-96+102.
[1]李玉平,何常德,张娟婷,张慧,宋金龙,薛晨阳.基于C-SOI工艺的一维MEMS电容式超声传感器阵列[J].传感器与微系统,2015,34(03):94-96+102. DOI： 10.13873/j.1000-9787(2015)03-0094-03.

LI Yu-ping, HE Chang-de, ZHANG Juan-ting, et al. One-dimensional MEMS capacitive ultrasonic transducer arrays based on C-SOI technology[J]. 2015, 34(3): 94-96+102. DOI： 10.13873/j.1000-9787(2015)03-0094-03.

摘要

提出了一种新的基于C-SOI工艺制备的电容式微加工超声传感器（CMUT）的方法。通过对加工过程中一些关键工艺步骤进行测试

发现所加工的微传感器尺寸与设计尺寸基本一致

且刻蚀的空腔高度均匀

键合效果良好

证明了工艺流程的可行性。此外

通过对所加工的传感器阵列进行测试发现

各阵元谐振频率和静态电容具有良好的一致性

说明以C-SOI工艺加工的CMUT器件满足设计要求

且适宜加工大阵列

这种加工技术使得加工成像阵列成为可能。

Abstract

Propose a new processing method based on cavity-in-SOI（ C-SOI） technology to fabricate capacitive micromachined ultrasonic transducer（ CMUT）. Key technical steps used in fabricating process are tested

it shows that the size of fabricated sensor is basically in accordance with the designed value

and cavities are uniform in height and the wafer bonding has obtained good effects

thus prove feasibility of process flow. Furthermore

it show that resonant frequency and static capacitance has good uniformity by testing on the designed array

which indicates that the CMUT devices based on C-SOI technology meet design requirements and are suitable for processing large arrays

and make it possible to process imaging array.

关键词

Keywords

references

一种基于MATLAB的CMUT阵列设计与成像仿真方法 [J]. 张慧,何常德,苗静,李玉平,张文栋,薛晨阳. 传感技术学报 . 2014(04)

基于硅晶圆键合工艺的MEMS电容式超声传感器设计 [J]. 苗静,何常德,廉德钦,张慧,于佳琪,宛克敬,薛晨阳,张文栋. 传感技术学报 . 2012(12)

电容式微超声传感器的电极参数优化设计 [J]. 张慧,宋光德,靳世久,官志坚,刘娟. 传感技术学报 . 2010(07)

超声相控阵检测关键技术的研究 [D]. 程继隆. 南京航空航天大学 2010

Optimum beam steering of linear phased arrays [J] . Shi-Chang Wooh,Yijun Shi. Wave Motion . 1999 (3)

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Related Institution

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