Preparation and properties study of Pt / ITO thin-film thermocouple on ceramic substrates

LIU Hai-jun; JIANG Hong-chuan; WU Meng; ZHAO Xiao-hui; JIANG Shu-wen; ZHANG Wan-li

doi:10.13873/j.1000-9787(2015)03-0018-03

Chinese

您当前的位置：

首页 >

文章列表页 >

Preparation and properties study of Pt / ITO thin-film thermocouple on ceramic substrates

更新时间：2025-09-11

- Preparation and properties study of Pt / ITO thin-film thermocouple on ceramic substrates
- Vol. 34, Issue 3, Pages: 18-20(2015)
- 作者机构：
  
  电子科技大学电子薄膜与集成器件国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2015)03-0018-03
  CLC： TH811
- Published：2015
- 稿件说明：
移动端阅览
[1]刘海军,蒋洪川,吴勐,赵晓辉,蒋书文,张万里.陶瓷基Pt/ITO薄膜热电偶的制备与性能研究[J].传感器与微系统,2015,34(03):18-20.

LIU Hai-jun, JIANG Hong-chuan, WU Meng, et al. Preparation and properties study of Pt / ITO thin-film thermocouple on ceramic substrates[J]. 2015, 34(3): 18-20.
[1]刘海军,蒋洪川,吴勐,赵晓辉,蒋书文,张万里.陶瓷基Pt/ITO薄膜热电偶的制备与性能研究[J].传感器与微系统,2015,34(03):18-20. DOI： 10.13873/j.1000-9787(2015)03-0018-03.

LIU Hai-jun, JIANG Hong-chuan, WU Meng, et al. Preparation and properties study of Pt / ITO thin-film thermocouple on ceramic substrates[J]. 2015, 34(3): 18-20. DOI： 10.13873/j.1000-9787(2015)03-0018-03.

摘要

为了准确测量涡轮叶片表面温度

采用掩模图形化和射频磁控溅射的方法

在Al2O3陶瓷基片上沉积Pt/ITO薄膜热电偶

并对其进行了静态标定。结果表明:Pt/ITO薄膜热电偶在1 000℃进行大气气氛退火

随着退火时间的增加

样品热电势输出曲线稳定性逐渐增强

Seebeck系数也较大

标定曲线均具有很好的线性度

退火5h的样品的最大测温误差仅为16.03℃

可在400

100℃温度范围热循环中稳定工作约20h。ITO薄膜厚度对Pt/ITO薄膜热电偶热电性能几乎没有影响。

Abstract

In order to measure the blade surface temperature precisely

Pt / ITO thin film thermocouples are deposited on Al2O3 ceramic substrates by shadow mask technique and RF magnetron sputtering. The thermoelectric properties of the samples are tested by static calibration. The results show that the stability of thermoelectric power output and the Seebeck coefficient of the thin film thermocouple are gradually improved with the increase of annealing time; calibration curves of all samples are of good linearity; the maximum temperature measurement error of the sample annealed at 5h is only 16. 03 ℃ in the atmosphere

which can work stably at 400

1 100 ℃ for 20h.Thickness of ITO thin film has no significant effect on thermal potential output o

f Pt / ITO film thermocouple.

关键词

Keywords

references

金属基Pt/ITO薄膜热电偶的制备 [J]. 赵文雅,蒋洪川,陈寅之,张万里,刘兴钊,彭少龙,唐磊. 测控技术 . 2013(04)

功能-结构一体化NiCr/NiSi薄膜热电偶的制备 [J]. 王从瑞,蒋洪川,陈寅之,张万里,刘兴钊,唐磊,于浩. 测控技术 . 2011(10)

金属基NiCr-NiSi薄膜热电偶的制备及性能研究 [J]. 姚飞,蒋洪川,张万里,刘兴钊,唐磊,于浩. 电子元件与材料 . 2010(09)

温度测量技术现状和发展概述 [J]. 杨永军. 计测技术 . 2009(04)

薄膜厚度对ITO膜结构与性能的影响 [J]. 辛荣生,林钰. 真空 . 2007(05)

ITO薄膜厚度和含氧量对其结构与性能的影响 [J]. 辛荣生,林钰. 电子元件与材料 . 2007(07)

同种材料组成热电偶产生热电势的分析 [J]. 王佐民,吴开宇. 哈尔滨理工大学学报 . 2004(05)

Fabrication and calibration of Pt–10%Rh/Pt thin film thermocouples [J] . Yinzhi Chen,Hongchuan Jiang,Wenya Zhao,Wanli Zhang,Xingzhao Liu,Shuwen Jiang. Measurement . 2014

Preparation and characterization of ceramic thin film thermocouples [J] . Otto J. Gregory,Eike Busch,Gustave C. Fralick,Ximing Chen. Thin Solid Films . 2010 (21)

Views

345

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Research on dynamic performances of thin film Pt/PtRh thermocouples

Design of dynamic force test device for circumferential power system

Research on simultaneous calibration for piezoelectric dynamometer

Research and fabrication of thin-film thermocouples for aeroengine

Design of a novel micro-force sensor

Related Author

DING Guifu

CHENG Ping

WANG Bo

YAO Jinyuan

WANG Gang

LI Yang

ZHAO Yi

ZHANG Jun

Related Institution

Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University

National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Shanghai Jiao Tong University

School of Mechanical Engineering,Dalian University of Technology

China Aerospace Engine Sichuan Gas Turbine Establishment

School of Mechanical Engineering,Tongji University

⁰