Simplified flow test device for MEMS gas flow sensors

GAO Yang; DAI Fu; XI Shi-wei; LIU Ting-ting

doi:10.13873/j.1000-9787(2014)08-0109-04

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Simplified flow test device for MEMS gas flow sensors

更新时间：2025-09-11

- Simplified flow test device for MEMS gas flow sensors
- Vol. 33, Issue 8, Pages: 109-112(2014)
- 作者机构：
  
  1. 中国工程物理研究院电子工程研究所
  2. 重庆大学光电技术及系统教育部重点实验室
  3. 西南科技大学信息工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2014)08-0109-04
  CLC： TH814
- Published：2014
- 稿件说明：
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[1]高杨,代富,席仕伟,刘婷婷.MEMS气体流量传感器的简易流量测试装置[J].传感器与微系统,2014,33(08):109-112.

GAO Yang, DAI Fu, XI Shi-wei, et al. Simplified flow test device for MEMS gas flow sensors[J]. 2014, 33(8): 109-112.
[1]高杨,代富,席仕伟,刘婷婷.MEMS气体流量传感器的简易流量测试装置[J].传感器与微系统,2014,33(08):109-112. DOI： 10.13873/j.1000-9787(2014)08-0109-04.

GAO Yang, DAI Fu, XI Shi-wei, et al. Simplified flow test device for MEMS gas flow sensors[J]. 2014, 33(8): 109-112. DOI： 10.13873/j.1000-9787(2014)08-0109-04.

摘要

为了完成所研制的MEMS气体流量传感器样品的流量测试与标定

设计制作了一种由标准流量发生器和传感器信号读出与数据采集电路组成的简易流量测试装置。标准流量发生器由注射器和可更换的砝码组成

利用不同的砝码配重

在注射器出气口产生合适的恒定气体流速。通过理论分析和Ansys有限元数值仿真

验证了简易标准流量发生器的可行性。传感器信号读出与数据采集电路基于内建多路A/D转换器的单片机实现

具有传感器加热电阻器的恒温控制、流量信号的数字检测和显示的功能。采用该简易流量测试装置对自行研制的MEMS气体流量传感器进行了流量测试与标定

获得了待测器件的标定参数、传感器流量测量的绝对误差和相对误差。

Abstract

To fulfill flow test and calibration of the developed MEMS gas flow sensor prototypes

a simplified flow test device composed of standard flow generator and a signal read-out and data acquisition circuit is designed and fabricated.The standard flow generator is composed of an injector and a variable weight

with a variable weight

a series of suitable constant gas flow rates can be generated at the injector outlet.Feasibility of the simplified standard flow generator is verified by theoretical analysis and numerical simulation with the Ansys software.The sensor read-out circuit and data acquisition circuit are realized based on microcontroller with multi-channel built-in A/D convertors

which has functions as constant temperature control of sensor heater

digital detection and display of flow signals.Using the simplified flow test device

flow test and calibration on the developed MEMS gas flow sensor prototypes is accomplished.Calibration parameters

absolute error and relative error of flow tests of sensor is obtained.

关键词

Keywords

references

热温差型微流量传感器热敏电阻自热的补偿方法 [J]. 代富,高杨,官承秋,周斌,何移. 半导体光电 . 2013(01)

热温差型微流量传感器的温度补偿方法研究 [J]. 代富,高杨,官承秋,周斌,何移. 微纳电子技术 . 2013(01)

多探头热式气体流量传感器的设计与仿真 [J]. 沈平平,梁国伟,赵伟国,冯洁. 传感器与微系统 . 2010(11)

MEMS热膜式微型流量传感器的研制 [J]. 徐永青,吕树海,徐爱东,徐淑静. 微纳电子技术 . 2010(04)

组合热膜探头热式气体流量计的研制 [J]. 黄震威,梁国伟,赵伟国,杨松迎. 中国计量学院学报 . 2009(01)

MEMS热敏微流量传感器研究 [J]. 刘国华,张伟,徐进良. 微细加工技术 . 2008(04)

硅热流量传感器及其封装 [J]. 高冬晖,秦明. 微纳电子技术 . 2004(05)

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硅基热温差式气体流量传感器的研究 [D]. 薛宁. 大连理工大学 2007

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