Design and fabrication of SAW gas sensor

ZHAO Yi-gui; LI Wei-long; ZHANG Sen

doi:10.13873/j.1000-9787(2014)08-0080-03

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Design and fabrication of SAW gas sensor

更新时间：2025-09-11

- Design and fabrication of SAW gas sensor
- Vol. 33, Issue 8, Pages: 80-82+86(2014)
- 作者机构：
  
  华东电子工程研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2014)08-0080-03
  CLC： TP212
- Published：2014
- 稿件说明：
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[1]赵以贵,李维龙,张森.声表面波气体传感器设计与制作[J].传感器与微系统,2014,33(08):80-82+86.

ZHAO Yi-gui, LI Wei-long, ZHANG Sen. Design and fabrication of SAW gas sensor[J]. 2014, 33(8): 80-82+86.
[1]赵以贵,李维龙,张森.声表面波气体传感器设计与制作[J].传感器与微系统,2014,33(08):80-82+86. DOI： 10.13873/j.1000-9787(2014)08-0080-03.

ZHAO Yi-gui, LI Wei-long, ZHANG Sen. Design and fabrication of SAW gas sensor[J]. 2014, 33(8): 80-82+86. DOI： 10.13873/j.1000-9787(2014)08-0080-03.

摘要

阐述了声表面波（SAW）甲基膦酸二甲酯（DMMP）气体传感器的设计和制作过程。为提高探测灵敏度和选择性

主要考虑了SAW振荡器的频率稳定性

敏感材料巯基十一酸（MUA）采用了分子自组装成膜方式和Cu2+化学修饰。实验结果显示:在1

00mg/m3的浓度范围内具有好的线性度和21Hz/mg/cm3的灵敏度。

Abstract

Design and fabrication process of surface acoustic wave（SAW） gas sensor for dimethyl-methylphosphonate（DMMP） detection is presented.To improve detection sensitivity and selectivity

frequency stability of SAW oscillator is considered carefully

and the 11-mercaptoundecanoic acid（MUA） adopts molecule selfassembled technology and chenically modified by Cu2+.Experimental result shows good linearity and the superior sensitivity of 21 Hz/mg/cm3 at concentration range of 1

100 mg/m3.

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