Progress on technologies of MEMS inertial sensors for modern military

LI Hong-guang

doi:10.13873/j.1000-9787(2014)08-0004-04

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Progress on technologies of MEMS inertial sensors for modern military

更新时间：2025-09-11

- Progress on technologies of MEMS inertial sensors for modern military
- Vol. 33, Issue 8, Pages: 4-7(2014)
- 作者机构：
  
  中国科学院长春光学精密机械与物理研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/j.1000-9787(2014)08-0004-04
  CLC： TJ5;TP212
- Published：2014
- 稿件说明：
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[1]李红光.现代军用MEMS惯性传感器技术进展[J].传感器与微系统,2014,33(08):4-7.

LI Hong-guang. Progress on technologies of MEMS inertial sensors for modern military[J]. 2014, 33(8): 4-7.
[1]李红光.现代军用MEMS惯性传感器技术进展[J].传感器与微系统,2014,33(08):4-7. DOI： 10.13873/j.1000-9787(2014)08-0004-04.

LI Hong-guang. Progress on technologies of MEMS inertial sensors for modern military[J]. 2014, 33(8): 4-7. DOI： 10.13873/j.1000-9787(2014)08-0004-04.

摘要

现代化军事需求小型惯性传感器。技术已成熟的惯性导航和制导系统包括机械陀螺、环形激光陀螺（RLGs）、光纤陀螺（FOGs）以及半球共振陀螺（HRGs）。现在主要用于军事的还有微机电系统（MEMS）陀螺仪和加速计。采用光子晶体光纤（PCFs）的干涉光纤陀螺（IFOGs）

即PC—IFOGs。重点阐述MEMS/集成光（IO）波导惯性传感器技术进展。分析小型陀螺仪和加速计技术发展前景及在未来快速反应

精确打击中的作用。

Abstract

Miniature inertial sensors are required in modern military.Mature technologies inertial navigation system includes mechanic gyros

ring laser gyros（RLGs）

fiber-optic gyros（FOGs） and hemispherical resonant gyros（HRGs）.Now some MEMS gyros and accelerometers have been used for military.Interference fiber-optic gyros（IFOGs） using photonic crystal（PC）（PC—IFOGs） is researched.Technical progress of MEMS/ integrated optical（IO） waveguide inertial sensors are described emphatically.Prospect of miniature gyros and accelerometers technologies and functions in precise strike for military in the future are analyzed.

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