华中科技大学集成电路学院武汉光电国家研究中心湖北光谷实验室
Published：2024
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[J]. 2024, (12): 117-121.
量子点具有晶粒尺寸小、比表面积大、表面活性位点多的特点，是低维气敏材料领域的研究前沿。然而，受量子限域效应的制约，量子点薄膜电阻通常较高，影响气体传感器的实用性。本文以硫化铅量子点室温气敏材料为研究对象，在陶瓷衬底上制备出量子点薄膜，分别对其薄膜电阻与电容的气敏效应进行了测试与分析。研究结果表明：量子点薄膜电容同样具有室温二氧化氮（NO
2
）气敏效应。以此为基础，提出融合量子点电容气敏效应与晶体管原理的新型气体传感器芯片结构，将量子点薄膜平面电容通过串联的方式形成气敏栅并进行仿真分析，利用量子点薄膜电容随气体发生变化的敏感效应，将气—固界面的化学作用转换为晶体管沟道电流信号，具有高灵敏度、低功耗、高集成度的特点。研究结果可为实现半导体气体传感器芯片设计和晶圆级制造提供参考。
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