徐庆达.MEMS矢量水听器的优化设计与实现[D].中北大学,2019(09).

陈尚.硅微MEMS仿生矢量水声传感器研究[D].中北大学,2008(11).

Guojun Zhang,Junwen Ding,Wei Xu,Yuan Liu,Renxin Wang,Janjun Han,Bing Bai,Chenyang Xue,Jun Liu,Wendong Zhang.Design and optimization of stress centralized MEMS vector hydrophone with high sensitivity at low frequency[J].Mechanical Systems and Signal Processing,2018.

Wei Xu,Yuan Liu,Guojun Zhang,Renxin Wang,Chenyang Xue,Wendong Zhang,Jun Liu.Development of cup-shaped micro-electromechanical systems-based vector hydrophone[J].Journal of Applied Physics,2016.

Henry Baltes,Oliver Brand.CMOS-based microsensors and packaging[J].Sensors & Actuators: A. Physical,2001.

Bruce D. Keller.Gradient hydrophone flow noise[J].The Journal of the Acoustical Society of America,1998(1).

Thomas B. Gabrielson,David L. Gardner,Steven L. Garrett.A simple neutrally buoyant sensor for direct measurement of particle velocity and intensity in water[J].The Journal of the Acoustical Society of America,1995(4).

Tabata Osamu,Asahi Ryouji,Funabashi Hirofumi,Shimaoka Keiichi,Sugiyama Susumu.Anisotropic etching of silicon in TMAH solutions[J].Sensors and Actuators A: Physical,1992(1).

张文栋,刘俊,熊继军,薛晨阳,张斌珍,谢斌,桑胜波,王建,陈建军.共振隧穿微声传感器[P].中北大学,2006.

苗晋威,杨沙沙,齐秉楠,乔庆宇,刘国昌,王任鑫.纤毛—硅柱结构MEMS二维矢量水听器设计与制备方法[J].传感器与微系统,2022(03).

李闯,赵立波,张磊,涂孝军,章建文.基于SOI的E型结构MEMS压力芯片优化设计与制造[J].传感器与微系统,2020(04).

郭玉刚,吴佐飞,田雷.硅(100)晶面各向异性腐蚀的凸角补偿方法[J].传感器与微系统,2019(03).

杨晟辉,丁俊文,张国军,裴毓,尚珍珍.高灵敏度扇面纤毛式MEMS矢量水听器[J].压电与声光,2018(04).

贾志富.三维同振球型矢量水听器的特性及其结构设计[J].应用声学,2001(04).