王子渊,何常德,任勇峰,王红亮,焦新泉,张文栋.电容式微机械超声换能器的发射性能研究[J].传感器与微系统,2021(12).

刘杰,陈全芳.电容式微机械超声传感器的工艺综述[J].仪器仪表学报,2018(08).

Gao Bizhen,Zhang Sai,He Changde,Wang Renxin,Yang Yuhua,Jia Licheng,Wang Zhihao,Wu Yang,Hu Shumin,Zhang Wendong.Research on Broadband Matching Method for Capacitive Micromachined Ultrasonic Transducers Based on PDMS/TiO2 Particles[J].Micromachines,2022.

Zhang Hui,Liang Dongmei,Wang Zhuochen,Ye Lei,Rui Xiaobo,Zhang Xiaoli.Fabrication and Characterization of a Wideband Low-frequency CMUT Array for Air-coupled Imaging[J].IEEE Sensors Journal,2020.

Zhou Zheng,Yao Yao,Yonghai Sun,John Yeow.Development of a highly sensitive humidity sensor based on the capacitive micromachined ultrasonic transducer[J].Sensors & Actuators: B. Chemical,2019.

Jiang Xiaoyue,Tang Hao-Yen,Lu Yipeng,Ng Eldwin J,Tsai Julius M,Boser Bernhard E,Horsley David A.Ultrasonic Fingerprint Sensor With Transmit Beamforming Based on a PMUT Array Bonded to CMOS Circuitry.[J].IEEE transactions on ultrasonics, ferroelectrics, and frequency control,2017.

Rui Zhang,Wendong Zhang,Changde He,Yongmei Zhang,Jinlong Song,Chenyang Xue.Underwater Imaging Using a 1 × 16 CMUT Linear Array[J].Sensors,2016.

Rui Zhang,Wendong Zhang,Changde He,Jinlong Song,Linfeng Mu,Juan Cui,Yongmei Zhang,Chenyang Xue.Design of capacitive micromachined ultrasonic transducer (CMUT) linear array for underwater imaging[J].Sensor Review,2016.

Chenyang Xue,Shang Chen,Wendong Zhang,Binzhen Zhang,Guojun Zhang,Hui Qiao.Design, fabrication, and preliminary characterization of a novel MEMS bionic vector hydrophone[J].Microelectronics Journal,2007.

Chia‐Hung Liu,Pei‐Tai Chen.Surface micromachined capacitive ultrasonic transducer for underwater imaging[J].Journal of the Chinese Institute of Engineers,2007(3).

Oralkan Omer,Ergun A Sanli,Johnson Jeremy A,Karaman Mustafa,Demirci Utkan,Kaviani Kambiz,Lee Thomas H,Khuri-Yakub Butrus T.Capacitive micromachined ultrasonic transducers: next-generation arrays for acoustic imaging?[J].IEEE transactions on ultrasonics, ferroelectrics, and frequency control,2002.