单亚蒙,任丽江,沈文江.应用于激光雷达的二维静电微镜设计[J].传感器与微系统,2021(02).

马天义,余跃,许敬,吴建东.MOEMS 2D扫描镜的研究进展[J].传感器与微系统,2016(06).

李莉,杨忠,耿征,沈春林.面向真三维立体显示的数字微镜器件应用研究[J].传感器与微系统,2008(09).

S. Gu-Stoppel,T. Lisec,S. Fichtner,N. Funck,M. Claus,B. Wagner,F. Lofink.AlScN based MEMS quasi-static mirror matrix with large tilting angle and high linearity[J].Sensors and Actuators: A. Physical,2020.

Gu Stoppel S.,Lisec T.,Claus M.,Funck N.,Fichtner S.,Schroeder S.,Wagner B.,Lofink F..A triple-wafer-bonded AlScN driven quasi-static MEMS mirror with high linearity and large tilt angles[J].MOEMS AND MINIATURIZED SYSTEMS XIX,2020.

OGUZHANOGLU ATILLA,KURT TÜLAY,ORTAÇ RAGIP,TURMAN BÜLENT.A review of micromirror arrays[J].Precision Engineering,2018.

Hopkins Jonathan B.,Panas Robert M.,Song Yuanping,White Carolyn D..Erratum to “A High-Speed Large-Range Tip-Tilt-Piston Micromirror Array” [Feb 17 196-205][J].Journal of Microelectromechanical Systems,2017.

Débarre Delphine,Botcherby Edward J,Watanabe Tomoko,Srinivas Shankar,Booth Martin J,Wilson Tony.Image-based adaptive optics for two-photon microscopy.[J].Optics letters,2009.

Chun-da Liao,Jui-che Tsai.The Evolution of MEMS Displays[J].IEEE Transactions on Industrial Electronics,2009.

Jason B. Stewart,Thomas G. Bifano,Steven Cornelissen,Paul Bierden,B. Martin Levine,Timothy Cook.Design and development of a 331-segment tip–tilt–piston mirror array for space-based adaptive optics[J].Sensors & Actuators: A. Physical,2007.

Il Woong Jung,Yves-Alain Peter,Emily Carr,Jen-Shiang Wang,Olav Solgaard.Single-Crystal-Silicon Continuous Membrane Deformable Mirror Array for Adaptive Optics in Space-Based Telescopes[J].IEEE journal of selected topics in quantum electronics: A publication of the IEEE Lasers and Electro-optics Society,2007.

Yano M.,Yamagishi F.,Tsuda T..Optical MEMS for photonic switching-compact and stable optical crossconnect switches for simple, fast, and flexible wavelength applications in recent photonic networks[J].IEEE journal of selected topics in quantum electronics: A publication of the IEEE Lasers and Electro-optics Society,2005.

Milanovic V.,Matus G.A.,McCormick D.T..Gimbal-less monolithic silicon actuators for tip-tilt-piston micromirror applications[J].IEEE journal of selected topics in quantum electronics: A publication of the IEEE Lasers and Electro-optics Society,2004.

Doble N.,Williams D.R..The application of MEMS technology for adaptive optics in vision science[J].IEEE journal of selected topics in quantum electronics: A publication of the IEEE Lasers and Electro-optics Society,2004.

Taylor WP.,Brazzle JD.,Osenar AB.,Corcoran CJ.,Jafri IH.,Keating D. Kirkos G.,Lockwood M.,Pareek A.,Bernstein JJ..A high fill factor linear mirror array for a wavelength selective switch[J].Journal of Micromechanics and Microengineering,2004.

Krulevitch Peter A.,Bierden Paul A.,Bifano Thomas,Carr Emily,Dimas Clara E.,Dyson Harold,Helmbrecht Michael A.,Kurczynski Peter,Muller Richard S.,Olivier Scot S.,Peter YvesAlain,Sadoulet Bernard,Solgaard Olav,Yang EuiHyeok.MOEMS spatial light modulator development at the Center for Adaptive Optics[J].Lawrence Livermore National Lab. (United States);Boston Micromachines Corp. (United States);Boston Univ. (United States);Univ. of California/Berkeley (United States);Stanford Univ. (United States);Lucent Technologies/Bell Labs. (United States);Jet Propulsion Lab. (United States),2003.