A kind of flexible capacitive pressure sensor based on polydimethylsiloxane（PDMS） and oxidized carbon nanotubes is designed

aiming at complex processing technology and structure of the flexible sensor

and on the basis of improving performance index of the sensor

the manufacturing cost is reduced and the manufacturing process is simplified. The sensor adopts sandwich structure

pyramid microstructure is added into the upper electrode layer

the conductive material is printed onto the flexible substrate by Sike screen printing process

PDMS film is prepared as intermediate dielectric layer. The lower electrode is laid with smooth conductive material. Based on the microstructure

it is more likely to deform under pressure

so the sensor will be more sensitive. The simulation results of the pyramid microstructure show that the shape variation of the sensor is larger when the microstructure is used under pressure. The sensor made by this method has the characteristics of low cost

simple process and high sensitivity

and has a broad application prospect in medical health detection and intelligent wearing.