Metal oxide semiconductor gas sensors are a hot topic in the field of gas sensors

and as one of the important components of metal oxide semiconductor gas sensors

the micro-hot plate is very important to the study of the structure and steady-state thermal characteristics of the micro hot plate.In order to study on influence of different structural parameters on the performance of the micro-hot plate

and to provide guidance for the design and optimization of the micro-hot plate

based on the micro-electro-mechanical system（MEMS） process technology

a suspended structure micro-hot plate is designed

and the material of the support layer and isolation layer of the micro-hot plate such as composition and film thickness are simulated.According to simulation results

trends on which factors impact on performance of micro-hot plate are obtained

on the basis

the optimal parameters design are obtained.