李胜利,黄立,马占锋,高健飞,王春水.Ⅰ号液在MEMS晶圆级封装中的应用研究[J].传感器与微系统,2021(05).

杨跃胜,武岳山.探针卡在芯片产业化中的应用分析[J].中国集成电路,2017(04).

程融,蒋珂玮,汪飞,李昕欣.服务于IC产业的MEMS探卡[J].微纳电子技术,2009(12).

汪飞,李昕欣,郭南翔,封松林.MEMS悬臂梁式芯片测试探卡[J].传感技术学报,2008(03).

郭南翔,汪飞,李昕欣.悬臂梁式MEMS探卡的设计和制造[J].仪表技术与传感器,2006(04).

Wenhan Fu,Chen-Fu Chien,Lizhen Tang.Bayesian network for integrated circuit testing probe card fault diagnosis and troubleshooting to empower Industry 3.5 smart production and an empirical study[J].Journal of Intelligent Manufacturing,2020(prep).

Sang-Kon Lee,In-Kyu Lee,Sung-Yun Lee,Sun-Kwang Hwang.Fabrication of 50.0 μm Ultra-Fine Pure Rhodium Wire, Using a Multi-Pass Wire Drawing Process, for Probe Card Pins[J].Materials,2019.