Measurement method of azimuth angle of modal principal axis based on micro hemisphere resonance gyroscope

L Qian; DING Xukai; CHEN He; JIA Jia; LI Hongsheng

doi:10.13873/J.1000-9787(2021)09-0117-04

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Measurement method of azimuth angle of modal principal axis based on micro hemisphere resonance gyroscope

更新时间：2025-09-11

- Measurement method of azimuth angle of modal principal axis based on micro hemisphere resonance gyroscope
- Issue 9, Pages: 117-120(2021)
- 作者机构：
  
  1. 东南大学仪器科学与工程学院
  2. 东南大学微惯性仪表与先进导航技术教育部重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2021)09-0117-04
  CLC： TH824.3
- Published：2021
- 稿件说明：
移动端阅览
L Qian, DING Xukai, CHEN He, et al. Measurement method of azimuth angle of modal principal axis based on micro hemisphere resonance gyroscope[J]. 2021, (9): 117-120.
DOI：

L Qian, DING Xukai, CHEN He, et al. Measurement method of azimuth angle of modal principal axis based on micro hemisphere resonance gyroscope[J]. 2021, (9): 117-120. DOI： 10.13873/J.1000-9787(2021)09-0117-04.

摘要

由于微半球谐振子吹制过程存在严重加工误差

将导致谐振子结构误差

进而导致微半球谐振子工作模态发生频率裂解和模态主轴轴向偏转

影响了陀螺仪的性能。而模态主轴方位角反映了谐振子的结构误差所在角度

可指导微谐振子结构误差研究和机械修调。本文从理想谐振子通用运动方程出发

推导了微半球谐振子误差模型

据此提出了一种可以通过电扫频所得数据计算微半球谐振子频率主轴方位角的方法。选择了两个Q值为1 930和13 390的微半球谐振子进行实验

得到二者的模态主轴方位角分别为30.36°和34.75°。最后通过仿真确定所提方法测得的模态主轴方位角有效。

Abstract

Due to severe processing errors in blowing process of micro hemisphere resonator

structure error of resonator will be caused

which will cause frequency splitting and deflection of modal principal axial which affect property of gyroscope.The azimuth angle of the modal principal axis reflects the angle of the structural error of the resonator

which can guide the structural error research and mechanical adjustment of the microresonator.Based on the general equation of motion of an ideal harmonic oscillator

the error model of the micro hemisphere resonator is derived.A method can be used to calculate the azimuth of the principal axis based on data obtained by electric frequency sweeping.Two micro hemisphere resonators with Q of 1 930 and 13 390 are selected for experiments.The modal principal axial azimuth angles of the two are 30.36 ° and 34.75 °

respectively.Finally

it is confirmed through simulation that the azimuth angle of the modal principal axial measured by this method is valid.

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