Aiming at the problem that MEMS gyroscope is influenced by processing error

there is quadrature coupling force whose phase difference with coriolis force is 90° between driving and detecting modes

which limits the stability of gyro zero-offset

a real-time correction system for quadrature error in force balance mode is designed.The system uses the force balance method to realize the Coriolis closed-loop detection.By adjusting the correction voltage

the structural stiffness coupling is cancelled

and real-time quadrature error correction is achieved.The experimental results show that the real-time correction system effectively suppresses the quadrature error and improves the gyroscope performance of zero offset.In the temperature range of 5～65 ℃

the zero offset temperature drift is changed from 0.75°/s manual one-time correction to 0.1°/s real-time correction

which is 7.5 times reduced; at room temperature

instability of zero offset is decreased from 4.05°/h to 0.96 °/h.