Based on design goal of miniaturized and digitized sensor

a new type of absolute linear displacement sensor is research and fabrication with the integration of Hall chip IC-MU and magnetic grid as the core.Working principle of the sensor based on Hall chip is introduced

sensor structure and circuit design scheme are given

and sensor prototype is calibrated.Piecewise linear interpolation and cubic spline interpolation methods are used to compensate the nonlinear error of the sensor.The experimental results show that the original error of the sensor is 0.014 mm

and the error is reduced to 0.003 6 mm and 0.003 0 mm

respectively

after compensation by the two methods

and the error compensations are effective.