Design and optimization of spatial 3-DOF micro-positioning platform

LI Changqi; WANG Han; LUO Hao

doi:10.13873/J.1000-9787(2021)08-0065-03

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Design and optimization of spatial 3-DOF micro-positioning platform

更新时间：2025-09-11

- Design and optimization of spatial 3-DOF micro-positioning platform
- Issue 8, Pages: 65-67+72(2021)
- 作者机构：
  
  1. 保山学院信息学院
  2. 马来西亚博特拉大学
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2021)08-0065-03
  CLC： TH122
- Published：2021
- 稿件说明：
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LI Changqi, WANG Han, LUO Hao. Design and optimization of spatial 3-DOF micro-positioning platform[J]. 2021, (8): 65-67+72.
DOI：

LI Changqi, WANG Han, LUO Hao. Design and optimization of spatial 3-DOF micro-positioning platform[J]. 2021, (8): 65-67+72. DOI： 10.13873/J.1000-9787(2021)08-0065-03.

摘要

耦合位移直接影响微定位平台输出精度。控制空间微定位平台耦合位移可以有效提高平台的输出精度。通过控制误差补偿的方式消除微定位平台耦合位移

平台的驱动方式采用压电驱动。基于卡氏定理计算出微定位平台输出端输出位移;利用ANSYS软件对微定位平台的柔性铰链进行尺寸优化

并对优化后的微定位平台进行仿真分析。最后

对理论计算数值和仿真分析数值进行对比。通过对微定位平台的研究

得出所设计平台具有高定位精度

低耦合位移

大行程的优势

为同类微定位平台的研究提高借鉴。

Abstract

Coupling displacement directly affects the output precision of the micro-positioning platform.Controlling the coupling displacement of the spatial micro-positioning platform can effectively improve the output accuracy of the platform.Use control error compensation to eliminate the coupling displacement of the micro-positioning platform.The driving method of the platform is piezoelectric drive.The output displacement of the micro-positioning platform’s output is calculated based on the Karnofsky’s theorem; the size of the flexible hinge of the micro-positioning platform is optimized using ANSYS software

and the optimized micro-positioning platform is simulated and analyzed.Finally

the theoretical calculation value and the simulation analysis value are compared.Through the research of the micro-positioning platform

it is concluded that the platform has the advantages of high positioning accuracy

low coupling displacement and large stroke

which can be used as a reference for the research of similar micro-positioning platforms.

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