Research on optical detection method of gyroscope based on WGM resonator cavity system

GONG Xuliang; XIA Dunzhu

doi:10.13873/J.1000-9787(2021)08-0031-04

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Research on optical detection method of gyroscope based on WGM resonator cavity system

更新时间：2025-09-11

- Research on optical detection method of gyroscope based on WGM resonator cavity system
- Issue 8, Pages: 31-34(2021)
- 作者机构：
  
  东南大学仪器科学与工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2021)08-0031-04
  CLC： TH824.3;TH-39
- Published：2021
- 稿件说明：
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GONG Xuliang, XIA Dunzhu. Research on optical detection method of gyroscope based on WGM resonator cavity system[J]. 2021, (8): 31-34.
DOI：

GONG Xuliang, XIA Dunzhu. Research on optical detection method of gyroscope based on WGM resonator cavity system[J]. 2021, (8): 31-34. DOI： 10.13873/J.1000-9787(2021)08-0031-04.

摘要

提出微光机电系统陀螺仪的光学检测方法

设计了由光栅耦合器、回音壁模式谐振腔和光波导组成的微光学检测器件

实现与盘式谐振陀螺仪的单片集成。理论分析了谐振腔的谱线漂移和耦合机制

通过调整结构参数得到品质因数为5 303.1。分析了光栅周期、刻蚀深度、入射角和上包层对光栅耦合器耦合效率的影响

通过不断优化调整最终实现了51.5%的水平耦合。最后对实验测试结果进行讨论。

Abstract

An optical detection method for a micro-opto-electro-mechanical system gyroscope is proposed.A micro-optical detection device composed of grating couplers

a whispering gallery mode resonator and an optical waveguide is designed to realize monolithic integration with a disk resonant gyroscope.The spectral drift and coupling mechanism of the resonator is theoretically analyzed.By adjusting the structural parameters

the quality factor is 5 303.1.The effects of grating period

etch depth

incident angle and upper cladding layer on the coupling efficiency of the grating couplers are analyzed

and 51.5 % horizontal coupling is finally achieved through continuous optimization of adjustment.Finally

the test results are discussed.

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