Design of large displacement parallel planar 3-DOF micro-positioning platform

HAN Hui; LIU Li

doi:10.13873/J.1000-9787(2021)06-0073-03

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Design of large displacement parallel planar 3-DOF micro-positioning platform

更新时间：2025-09-11

- Design of large displacement parallel planar 3-DOF micro-positioning platform
- Issue 6, Pages: 73-75(2021)
- 作者机构：
  
  1. 湖北文理学院
  2. 电子科技大学
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2021)06-0073-03
  CLC： TH112
- Published：2021
- 稿件说明：
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HAN Hui, LIU Li. Design of large displacement parallel planar 3-DOF micro-positioning platform[J]. 2021, (6): 73-75.
DOI：

HAN Hui, LIU Li. Design of large displacement parallel planar 3-DOF micro-positioning platform[J]. 2021, (6): 73-75. DOI： 10.13873/J.1000-9787(2021)06-0073-03.

摘要

微定位平台是能够实现微米级别定位或调整精度的柔性微动系统。扩大运动行程、提高固有频率是微定位平台的主要研究问题

通过三个放大机构相互制约

相互影响

设计一种大行程、高刚度、结构紧凑的平面三自由度微定位平台。平台的驱动方式采用压电驱动

压电陶瓷采用并联的方式。介绍了该平台的建模、计算和仿真分析。设计的平台的X和Y方向运动范围为185.8μm。载物台为边长32 mm的等边三角形

有效提高了结构的刚度和稳定性。

Abstract

Micro positioning platform is a flexible micro positioning system which can realize micro positioning or adjustment precision.A planar three degree of freedom micro-positioning platform with large travel

high stiffness and compact structure is designed through the mutual restriction and interaction of three amplification mechanisms.The driving mode of the platform is piezoelectric

and the piezoelectric ceramic is parallel.Modeling

calculation and simulation analysis of the platform are introduced.The motion range of the platform in X and Y directions is 185.8 μm.The platform is an equilateral triangle with 32 mm side length

which improves the rigidity and stability of the structure.

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Related Institution

School of Electrical and Electronic Engineering,Wuhan Polytechnic University

2.Key Laboratory of Time Reference and Applications,CAS,National Time Service Center,Chinese Academy of Sciences,Xi’an

University of Chinese Academy of Sciences

School of Instrument and Electronics,North University of China

2.Academy for Advanced Interdisciplinary Research,North University of China

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