Design and manufacture of butterfly vibration acceleration sensor

LI Kai; SHAN Heng; PU Jinfei; CHEN Weiqi; WU Xuezhong; HOU Zhanqiang

doi:10.13873/J.1000-9787(2021)06-0060-03

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Design and manufacture of butterfly vibration acceleration sensor

更新时间：2025-09-11

- Design and manufacture of butterfly vibration acceleration sensor
- Issue 6, Pages: 60-62(2021)
- 作者机构：
  
  1. 国防科技大学智能科学学院
  2. 唐智科技湖南发展有限公司
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2021)06-0060-03
  CLC： TP212
- Published：2021
- 稿件说明：
移动端阅览
LI Kai, SHAN Heng, PU Jinfei, et al. Design and manufacture of butterfly vibration acceleration sensor[J]. 2021, (6): 60-62.
DOI：

LI Kai, SHAN Heng, PU Jinfei, et al. Design and manufacture of butterfly vibration acceleration sensor[J]. 2021, (6): 60-62. DOI： 10.13873/J.1000-9787(2021)06-0060-03.

摘要

针对故障诊断与安全监测的应用需求

设计了一种大量程、体积小、高谐振频率的蝶翼式振动加速度传感器。通过COMSOL有限元分析(FEA)对敏感结构进行了分析与优化设计。采用了基于绝缘体上硅(SOI)圆片的敏感结构制造工艺完成了敏感结构的加工

将敏感结构与信号检测电路进行了集成

并与传感器结构件进行了封装

完成了蝶翼式加速度传感器的制造。最终

对蝶翼式振动加速度传感器的灵敏度、灵敏度误差、谐振频率等主要性能指标进行了测试。

Abstract

A butterfly vibration acceleration sensor with wide-range

small volume and high resonance frequency

aiming at the application requirements of fault diagnosis and safety monitoring.The specific dimensions of the sensitive structure are simulated and optimized based on the finite element analysis（FEA） software of COMSOL.The accelerometer sensitive structure is fabricated by the SOI wafer.Then the sensitive structure and the signal detecting circuit are integrated and encapsulated by the sensor package part.Finally

the main performance of the sensor are characterized including sensitivity

sensitivity error

resonance frequency

etc.

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