Research on dynamic performances of thin film Pt/PtRh thermocouples

WANG Gang; YAO Jinyuan; WANG Bo; CHENG Ping; DING Guifu

doi:10.13873/J.1000-9787(2021)06-0037-03

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Research on dynamic performances of thin film Pt/PtRh thermocouples

更新时间：2025-09-11

- Research on dynamic performances of thin film Pt/PtRh thermocouples
- Issue 6, Pages: 37-39(2021)
- 作者机构：
  
  1. 上海交通大学微米/纳米加工技术国家级重点实验室
  2. 上海交通大学电子信息与电气工程学院微纳电子学系
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2021)06-0037-03
  CLC： V233;TH811
- Published：2021
- 稿件说明：
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WANG Gang, YAO Jinyuan, WANG Bo, et al. Research on dynamic performances of thin film Pt/PtRh thermocouples[J]. 2021, (6): 37-39.
DOI：

WANG Gang, YAO Jinyuan, WANG Bo, et al. Research on dynamic performances of thin film Pt/PtRh thermocouples[J]. 2021, (6): 37-39. DOI： 10.13873/J.1000-9787(2021)06-0037-03.

摘要

鉴于航空发动机部件温度高、温度变化快的特性

本文采用微机电系统(MEMS)工艺制备高温Pt-PtRh薄膜热电偶

分别搭建薄膜热电偶的静态标定和动态响应测试平台

对薄膜热电偶的热电输出特性进行了标定

结果表明:Pt-PtRh薄膜热电偶与标准丝状同材质热电偶的输出特性基本一致

平均塞贝克系数为13.8μV/K

动态测试的整体响应时间在25～40μs范围内

具有很快的响应速度。

Abstract

Temperature of aircraft engine is very high and it changes rapidly

Pt-PtRh thin film thermocouple is fabricated by micro-electro-mechanical system（MEMS）process to acquire its static and dynamic performances.The testing systems is built.The static output is nearly the same as that of standard thermocouple.The average Seebeck coefficient is 13.8 μV/K.Response time of dynamic output is 25～40 μs.The result shows fast response speed and good repeatability.

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