Aiming at the requirement of high precision cryogenic temperature measurement

a MEMS cryogenic temperature sensor based on zirconium oxynitride film is proposed.Through the micro-machining process

the sensor preparation and packaging are combined to effectively simplify the preparation process of the conventional low-temperature temperature sensor and reduce the size of the low-temperature temperature sensor.The prepared cryogenic temperature sensor has a size of only 3.2 mm × 2.0 mm × 0.73 mm and mass is less than 12 mg.Through the particle impact noise detection and microstructure observation

the bump structure and the metallized cavity in the cover plate can effectively improve the reliability of the sensor.The prepared cryogenic temperature sensor is calibrated by a low temperature test platform

and the sensor is suitable for temperature measurement between4.2 ～ 300 K

especially when the temperature is below 50 K

the sensor has high sensitivity.The magnetic field environment test shows that the sensor has good stability in magnetic field.