Research and fabrication of an engineering micro-electro-mechanical accelerometer

MA Zhikang; ZHAO Tingjie; LIU Guowen; LI Zhaohan; LIU Yu; XU Yuxin

doi:10.13873/J.1000-9787(2021)01-0088-03

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Research and fabrication of an engineering micro-electro-mechanical accelerometer

更新时间：2025-09-11

- Research and fabrication of an engineering micro-electro-mechanical accelerometer
- Vol. 40, Issue 1, Pages: 88-90(2021)
- 作者机构：
  
  1. 北京航天控制仪器研究所
  2. 浙江大学航空航天学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2021)01-0088-03
  CLC： TH824.4
- Published：2021
- 稿件说明：
移动端阅览
[1]马智康,赵亭杰,刘国文,李兆涵,刘宇,徐宇新.一种工程化微机电加速度计研制[J].传感器与微系统,2021,40(01):88-90.

MA Zhikang, ZHAO Tingjie, LIU Guowen, et al. Research and fabrication of an engineering micro-electro-mechanical accelerometer[J]. 2021, 40(1): 88-90.
[1]马智康,赵亭杰,刘国文,李兆涵,刘宇,徐宇新.一种工程化微机电加速度计研制[J].传感器与微系统,2021,40(01):88-90. DOI： 10.13873/J.1000-9787(2021)01-0088-03.

MA Zhikang, ZHAO Tingjie, LIU Guowen, et al. Research and fabrication of an engineering micro-electro-mechanical accelerometer[J]. 2021, 40(1): 88-90. DOI： 10.13873/J.1000-9787(2021)01-0088-03.

摘要

提出一种"三明治"电容式检测原理的闭环微机电加速度计敏感结构

并对该敏感结构基础电容及微机电加速度计量程、标度因数等主要指标进行了设计

通过模态仿真验证了该结构参数对工作模态和干扰模态之间频率隔离的有效性。设计了分立电路闭环整表双腔封装/组装方案

实现了微机电加速度计整表样机

并对该样机量程和一次通电稳定性指标进行了测试。测试结果表明:该加速度计实现了量程大于±50 g

一次通电稳定性（1 h

1σ）达到了5.97×10

-5

。

Abstract

A sensitive"sandwich"structure for closed-loop micro-electro-mechanical accelerometer based on the principle of capacitive detection is proposed

and main indexes such as the capacitance of the sensitive structure

range of the micro-electro-mechanical accelerometer and scale factor are designed

and the modal simulation verifiesthe effectiveness of the structural parameters on frequency isolation between the working mode and the interference mode.The package/assembly scheme of the closed loop and double cavity of the discrete circuit is designed

and the whole prototype of the micro-electro-mechanical accelerometer is realized.The prototype range and one-time power-on stability indicators are tested.The test results show that the accelerometer achieves ran

ge >± 50 g

one-time power-on stability（1 h

1 σ） reaches 5.97 ×10

-5

关键词

Keywords

references

一种电容式微加速度计标度因数温漂抑制方法 [J]. 刘云峰,夏澎波,董景新,杨谢天. 中国惯性技术学报 . 2018(03)

微惯性仪表[M]. 清华大学出版社 , 董景新等编著, 2003

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