Based on the research results at home and abroad

thin film piezoelectric coefficient test methods are ctogry introduced

such as vertical pressure loading method based on positive piezoelectric effect

pneumatic loading method

cantilever beam method and laser interferometry based on inverse piezoelectric effect

microscopy.X-ray diffraction method

as well as bulk acoustic wave and surface acoustic wave method using indirect measurement

and composite resonance method. Based on the research status of piezoelectric coefficient test

the latest research progress of test methods is reported. With the rapid development of high-throughput experiments

high-throughput test methods have gradually become the development direction of material testing. For highthroughput measurement of piezoelectric film piezoelectric coefficient

cantilever beam method and X-ray diffraction method are expected to achieve parallel testing of multiple samples

significantly improve experimental efficiency

provide data support for material simulation calculation

and simultaneously provide experimental verification for the results of simulation.