Mechanical analysis of shock on MEMS micro-mechanical structure

GAO Cheng; WANG Yihao; FU Chengcheng; HUANG Jiaoying; WANG Changxin

doi:10.13873/J.1000-9787(2020)09-0009-04

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Mechanical analysis of shock on MEMS micro-mechanical structure

更新时间：2025-09-11

- Mechanical analysis of shock on MEMS micro-mechanical structure
- Vol. 39, Issue 9, Pages: 9-12+15(2020)
- 作者机构：
  
  1. 北京航空航天大学可靠性与系统工程学院
  2. 中国船舶工业系统工程研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2020)09-0009-04
  CLC： TH-39
- Published：2020
- 稿件说明：
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[1]高成,王怡豪,傅成城,黄姣英,王长鑫.MEMS微机械结构受冲击力学分析[J].传感器与微系统,2020,39(09):9-12+15.

GAO Cheng, WANG Yihao, FU Chengcheng, et al. Mechanical analysis of shock on MEMS micro-mechanical structure[J]. 2020, 39(9): 9-12+15.
[1]高成,王怡豪,傅成城,黄姣英,王长鑫.MEMS微机械结构受冲击力学分析[J].传感器与微系统,2020,39(09):9-12+15. DOI： 10.13873/J.1000-9787(2020)09-0009-04.

GAO Cheng, WANG Yihao, FU Chengcheng, et al. Mechanical analysis of shock on MEMS micro-mechanical structure[J]. 2020, 39(9): 9-12+15. DOI： 10.13873/J.1000-9787(2020)09-0009-04.

摘要

对微机电系统（MEMS）加速度传感器ADXL203的微机械结构建立三维模型

使用卡式定理与线性弹性理论推导折叠梁X

Z方向刚度

并利用ANSYS有限元仿真验证了刚度计算结果。求解结构阻尼系数

由阻尼受迫振动模型入手

采用准静态理论或振动理论

分析微机械结构在冲击脉冲下的响应规律

推导出在半正弦波冲击条件下

微机械结构的运动方程。计算得到微机械结构在X

Y方向最大位移为0.883

0.878 6 mm

分别在冲击发生后的0.141

0.142 ms时。提出了微机械结构刚度、阻尼、运动方程的求解方法

便于分析其失效机理

指导MEMS冲击试验的进行。

Abstract

Three-dimensional（ 3 D） model for micro-mechanical structure（ MMS） of micro-electro-mechanical system（ MEMS） acceleration sensor ADXL 203 is set up. Castigliano Theorem and linear elasticity theory are used to derive the stiffness of folding beams in X

and Z directions. And the stiffness calculation results are verified by ANSYS. Then the damping coefficients of MMS are solved. Finally

based on the damped forced vibration model

the response rule of MMS under shock pulse is analyzed by quasi-static theory or vibration theory. And the motion equation of MMS under the condition of half sine wave shock is derived. The maximum displacement of the structure in X and Y directions is 0. 883 mm and 0. 8786 mm

respectively. 0. 883 mm occurs at 0. 141 ms and 0. 8786 mm occurs at 0. 142 ms after shock. A solving method of stiffness

damping and motion equations of MMS is proposed

which is convenient for analyzing on failure mechanism and guiding the shock test of MEMS.

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Keywords

references

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