Disk structured MEMS gyroscope based on electrostatic tuning

ZHANG Linxin; WANG Junduo; SHEN Wenjiang

doi:10.13873/J.1000-9787(2020)05-0071-03

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Disk structured MEMS gyroscope based on electrostatic tuning

更新时间：2025-09-11

- Disk structured MEMS gyroscope based on electrostatic tuning
- Issue 5, Pages: 71-73+80(2020)
- 作者机构：
  
  1. 中国科学技术大学纳米技术与纳米仿生学院
  2. 中国科学院苏州纳米技术与纳米仿生研究所纳米器件与应用重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2020)05-0071-03
  CLC： TP212
- Published：2020
- 稿件说明：
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ZHANG Linxin, WANG Junduo, SHEN Wenjiang. Disk structured MEMS gyroscope based on electrostatic tuning[J]. 2020, (5): 71-73+80.
DOI：

ZHANG Linxin, WANG Junduo, SHEN Wenjiang. Disk structured MEMS gyroscope based on electrostatic tuning[J]. 2020, (5): 71-73+80. DOI： 10.13873/J.1000-9787(2020)05-0071-03.

摘要

设计了一种采用微机电系统(MEMS)技术的绝缘体上硅(SOI)与玻璃阳极键合工艺的陀螺仪。分析了提高陀螺仪性能的主要手段

结合实际工艺能力

设计了较大电容极板正对面积的器件。利用真空腔、网络分析仪、跨阻放大器、直流电源

进行扫频实验

得到了器件的幅频响应特性。基于MEMS陀螺仪的工作原理

设计静电调修的方法

实现了器件驱动轴和敏感轴的谐振频率裂解从293. 75 Hz缩小到6. 25 Hz。

Abstract

A micro-electro-mechanical system（ MEMS） gyroscope based on silicon-on-insulator（ SOI） and glass anodic bonding process is designed. The main means to improve performance of the gyroscope is analyzed.Combined with actual process capability

the device with larger area of the capacitor plate is designed. Amplitude frequency response characteristics of the device is obtained by frequency scanning experiment using a vacuum chamber

a network analyzer

a transimpedance amplifier

and a DC power supply. Based on the working principle of the MEMS gyroscope

electrostatic tuning method is designed to reduce the resonant frequency split between the drive axis and the sensitive axis of the device from 293. 75 Hz to 6. 25 Hz.

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