Design of silicon-based piezoelectric MEMS spherical vector hydrophone

LI Fen; SHI Shuzheng; YANG Xiangyu; HE Jian

doi:10.13873/J.1000-9787(2020)03-0084-03

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Design of silicon-based piezoelectric MEMS spherical vector hydrophone

更新时间：2025-09-11

- Design of silicon-based piezoelectric MEMS spherical vector hydrophone
- Issue 3, Pages: 84-86(2020)
- 作者机构：
  
  1. 中北大学仪器科学与动态测试教育部重点实验室
  2. 河北建筑工程学院机械工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2020)03-0084-03
  CLC： TB565.1
- Published：2020
- 稿件说明：
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LI Fen, SHI Shuzheng, YANG Xiangyu, et al. Design of silicon-based piezoelectric MEMS spherical vector hydrophone[J]. 2020, (3): 84-86.
DOI：

LI Fen, SHI Shuzheng, YANG Xiangyu, et al. Design of silicon-based piezoelectric MEMS spherical vector hydrophone[J]. 2020, (3): 84-86. DOI： 10.13873/J.1000-9787(2020)03-0084-03.

摘要

为实现水听器体积微型化

提高其固有频率并保证灵敏度

提出了一种新型无源器件

即基于压电效应的微机电系统(MEMS)一维球形矢量水听器。使用COMSOL软件进行仿真设计

确定器件关键尺寸。采用MEMS工艺加工制得器件并进行测试

结果表明:该水听器灵敏度达到-205 dB(0 dB=1 V/μPa)

固有频率可达到1. 6 kHz

具有良好的一维指向性。

Abstract

Hydrophones are widely used in underwater acoustic signal detection and underwater target tracking. To realize miniaturization of volume of hydrophone

improve its natural frequency and ensure sensitivity

a new type of passive components

a MEMS spherical vector hydrophone based on piezoelectric effect is proposed. The COMSOL software is used for simulation design to determine the key size of the device. MEMS process is used for fabrication and the device is tested. Test result shows that the sensitivity of the hydrophone can reach-205 db（ 0 dB = 1 V/μPa）

the natural frequency can reach 1. 6 kHz

and it has good one-dimensional directivity.

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