Research on high precision displacement detection system of dual frequency laser interferometer with complementary calibration

ZHANG Fan; LIU Jin; YANG Haima

doi:10.13873/J.1000-9787(2020)03-0014-04

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Research on high precision displacement detection system of dual frequency laser interferometer with complementary calibration

更新时间：2025-09-11

- Research on high precision displacement detection system of dual frequency laser interferometer with complementary calibration
- Issue 3, Pages: 14-17(2020)
- 作者机构：
  
  1. 上海工程技术大学电子电气工程学院
  2. 上海理工大学光电信息与计算机工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2020)03-0014-04
  CLC： TH822
- Published：2020
- 稿件说明：
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ZHANG Fan, LIU Jin, YANG Haima. Research on high precision displacement detection system of dual frequency laser interferometer with complementary calibration[J]. 2020, (3): 14-17.
DOI：

ZHANG Fan, LIU Jin, YANG Haima. Research on high precision displacement detection system of dual frequency laser interferometer with complementary calibration[J]. 2020, (3): 14-17. DOI： 10.13873/J.1000-9787(2020)03-0014-04.

摘要

为了实现光栅刻划机的超高精度定位

提出互补校准式方法实现高精度位移检测

以光栅尺作为纳米定位平台的定位测量装置

双频激光干涉位移测量系统作为测量基准对光栅尺测量误差进行补偿校准

提高光栅尺测量精度

从而达到精准定位。基于双频激光干涉的测量原理

推导了干涉位移计算公式、补偿公式

对超高精密测量光路进行搭建

并利用Edlen公式给出了一种有效的波长实时补偿方法

以提高位移测量精度。采用步进采样比对法验证系统的可行性

经过校准后的系统将精度从±0. 5μm提高到±0. 1μm

满足光栅刻划机精度检测需求。经过实验验证

提出的系统对纳米级定位检测是可行的。

Abstract

In order to achieve realization of ultra-high-precision positioning. of grating a method of complementary calibration is proposed to realize high-precision displacement detection. The grating ruler is used as the positioning measuring device of the nano-positioning platform and the dual-frequency laser interferometric displacement measuring system is used as the measuring reference to compensate and calibrate the measuring error of the grating ruler to improve the measuring precision of the grating ruler. To achieve the purpose of precise positioning. Based on the measurement principle of dual-frequency laser interferometry

the formulas of the interference displacement and the compensation formulas are deduced

and the ultra-high precision measurement optical path are established. An effective wavelength compensation method is given by Edlen formula to improve the precision of the displacement measurement. Step-by-step sampling and comparing method is used to validate the feasibility of system is verified. The precision calibrated system is improved from ± 0. 5 μm to ± 0. 1 μm

which meets the requirements of grating scoring precision detection. By experimental verification

the proposed system is feasible for nano-scale positioning detection.

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