Digital closed-loop drive design based on fuzzy control of MEMS gyroscope

PENG Xincheng; WANG Sujuan; LIU Yuxian; CHEN Ting; TANG Li

doi:10.13873/J.1000-9787(2019)09-0105-03

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Digital closed-loop drive design based on fuzzy control of MEMS gyroscope

更新时间：2025-09-11

- Digital closed-loop drive design based on fuzzy control of MEMS gyroscope
- Vol. 38, Issue 9, Pages: 105-107+111(2019)
- 作者机构：
  
  1. 江西理工大学机电工程学院
  2. 广东顺德创新设计研究院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2019)09-0105-03
  CLC： TN96
- Published：2019
- 稿件说明：
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[1]彭焮成,王素娟,刘玉县,陈婷,汤丽.基于模糊控制的MEMS陀螺仪数字驱动闭环设计[J].传感器与微系统,2019,38(09):105-107+111.

PENG Xincheng, WANG Sujuan, LIU Yuxian, et al. Digital closed-loop drive design based on fuzzy control of MEMS gyroscope[J]. 2019, 38(9): 105-107+111.
[1]彭焮成,王素娟,刘玉县,陈婷,汤丽.基于模糊控制的MEMS陀螺仪数字驱动闭环设计[J].传感器与微系统,2019,38(09):105-107+111. DOI： 10.13873/J.1000-9787(2019)09-0105-03.

PENG Xincheng, WANG Sujuan, LIU Yuxian, et al. Digital closed-loop drive design based on fuzzy control of MEMS gyroscope[J]. 2019, 38(9): 105-107+111. DOI： 10.13873/J.1000-9787(2019)09-0105-03.

摘要

提出了基于模糊控制的微机电系统（MEMS）陀螺驱动闭环设计的方法

介绍该方法在MEMS陀螺驱动模态的应用

并在现场可编程门阵列（FPGA）平台上实现。模糊控制属于智能控制的一种

具有很强的鲁棒性、稳定性和非线性系统的控制能力。主要在于基于模糊控制的MEMS陀螺数字驱动闭环的方法

将陀螺驱动信号在FPGA的内部处理。由坐标旋转数字计算机（CORDIC）算法产生驱动及解调正弦波信号

驱动模态位移信号经过解调和低通滤波后

再由模糊控制对幅值进行恒定控制。实验结果表明:该设计方法能够使MEMS陀螺仪稳定工作在谐振状态下

幅值基本保持恒定

数字驱动闭环的响应信号幅值抖动精度可达到51×10

-6

。

Abstract

A digital closed-loop drive design for MEMS gyroscope based on fuzzy control is proposed. The application of this method in MEMS gyro driving mode is introduced and implemented on the field programmable gate array（ FPGA） platform. Fuzzy control is a kind of intelligent control

it has strong robustness

stability and control ability of nonlinear systems. The proposed method is mainly MEMS gyroscope digital drive closed-loop method based on fuzzy control

process the drive signal of gyro inside the FPGA. Drive and the sine wave signal and demodulation signal are generated by the coordinate rotation digital computer（ CORDIC） algorithm. Drive mode displacement signal is demodulated and low-pass filtered

the

amplitude is thermostatic controlled by the fuzzy control. The experimental results show that the design method can make the MEMS gyroscope work under the resonant condition stably

the amplitude is kept constant

and the digital drive closed-loop response signal amplitude jitter precision can reach 51 × 10

-6

关键词

Keywords

references

MEMS陀螺技术国内外发展现状简述 [J]. 陈尚,张世军,穆星科,陈永强. 传感器世界 . 2016(04)

滑动DCT-LMS自适应算法研究与FPGA实现 [J]. 高海飞,张浩,侯富诚,向永波. 传感器与微系统 . 2012(05)

深入浅出通信原理[M]. 清华大学出版社 , 陈爱军, 2017

智能控制及其MATLAB实现[M]. 电子工业出版社 , 李国勇编著, 2005

Electromagnetic field occupational exposure: Non-thermal vs. thermal effects [J] . M. Israel,V. Zaryabova,M. Ivanova. Electromagnetic Biology and Medicine . 2013 (2)

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