Research on influence of surface metallization on quality factor of micro hemispherical gyroscope

WANG Zhenjun; HE Hanhui; LI Wei; LU Kun; SHI Yan; XIAO Dingbang

doi:10.13873/J.1000-9787(2019)09-0006-03

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Research on influence of surface metallization on quality factor of micro hemispherical gyroscope

更新时间：2025-09-11

- Research on influence of surface metallization on quality factor of micro hemispherical gyroscope
- Vol. 38, Issue 9, Pages: 6-8(2019)
- 作者机构：
  
  国防科技大学智能科学学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2019)09-0006-03
  CLC： TH824.3;TN96
- Published：2019
- 稿件说明：
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[1]王振军,何汉辉,李微,卢坤,石岩,肖定邦.表面金属化对微半球陀螺品质因数影响研究[J].传感器与微系统,2019,38(09):6-8.

WANG Zhenjun, HE Hanhui, LI Wei, et al. Research on influence of surface metallization on quality factor of micro hemispherical gyroscope[J]. 2019, 38(9): 6-8.
[1]王振军,何汉辉,李微,卢坤,石岩,肖定邦.表面金属化对微半球陀螺品质因数影响研究[J].传感器与微系统,2019,38(09):6-8. DOI： 10.13873/J.1000-9787(2019)09-0006-03.

WANG Zhenjun, HE Hanhui, LI Wei, et al. Research on influence of surface metallization on quality factor of micro hemispherical gyroscope[J]. 2019, 38(9): 6-8. DOI： 10.13873/J.1000-9787(2019)09-0006-03.

摘要

熔融石英谐振结构是微半球谐振陀螺的核心部件

为满足陀螺应用需求

需要对谐振结构进行表面金属化处理以增强其导电性。利用COMSOL软件对表面金属化后谐振结构的热弹性损耗进行了仿真和分析。结果表明:表面金属层会极大地增加谐振结构热弹性损耗

且表面金属层越厚

对热弹性品质因数影响越大。同时

对同一批次金属化后的微半球谐振结构进行了测试以及退火。测试结果表明:退火后谐振结构品质因数有显著提升

最高提升112. 63%。

Abstract

Fused silica resonant structure is core component of micro hemisphere resonant gyroscope. In order to meet application needs of gyroscope

it is necessary to process the fused silica resonant structure with some metal materials to enhance its electrical conductivity. Software COMSOL is used to simulate and analyze the thermoelastic dissipation of resonant structure. The result shows that the surface metal layer will greatly increase the thermoelastic dissipation of resonant structure and the influence will increase with thicker surface metal layer.At the same time

the same batch of micro hemisphere resonant structure after metallized are tested and annealed.The result shows the quality factor of the resonant structure is improved obviously after annealing

up to 112. 63 %.

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references

半球陀螺谐振子的金属化镀膜工艺技术研究 [J]. 张挺,徐思宇,冒继明,谭文耀,蒋春桥. 压电与声光 . 2006(05)

薄膜技术与薄膜材料[M]. 清华大学出版社 , 田民波, 2011

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