Study on influencing factors of graphene-based SnO<sub>x</sub>-Sn sensors gas sensitivity

YUAN Yutong; YANG Yangfeifei; ZHAO Yiyuan; HUANG Wenjie; XIE Haifen

doi:10.13873/J.1000-9787(2019)08-0005-04

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Study on influencing factors of graphene-based SnO_x-Sn sensors gas sensitivity

更新时间：2025-09-11

- Study on influencing factors of graphene-based SnO_x-Sn sensors gas sensitivity
- Issue 8, Pages: 5-8(2019)
- 作者机构：
  
  华东理工大学理学院物理系
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2019)08-0005-04
  CLC： TP212
- Published：2019
- 稿件说明：
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YUAN Yutong, YANG Yangfeifei, ZHAO Yiyuan, et al. Study on influencing factors of graphene-based SnO_x-Sn sensors gas sensitivity[J]. 2019, (8): 5-8.
DOI：

YUAN Yutong, YANG Yangfeifei, ZHAO Yiyuan, et al. Study on influencing factors of graphene-based SnO_x-Sn sensors gas sensitivity[J]. 2019, (8): 5-8. DOI： 10.13873/J.1000-9787(2019)08-0005-04.

摘要

为提高本征石墨烯的气敏特性

将锡和氧化锡薄膜蒸镀在气相沉积法制备的石墨烯表面

制成石墨烯基SnO

-Sn气体传感器

通过原子力显微镜（AFM）、场发射扫描电镜（FESEM）对其表面结构进行表征。并测试了其在室温下对低体积分数甲醛和二氧化氮（NO

）气体的响应特性。研究并分析了膜蒸发速率、基底加热时间、氧气流量对传感器响应灵敏度的影响。

Abstract

In order to improve gas sensing properties of pristine graphene

tin and tin oxide thin-film is deposited by thermal evaporation on the surface of graphene prepared by low pressure chemical vapor deposition（ LPCVD）

and graphene-based SnO

-Sn gas sensors are fabricated. The surface structure of the samples is characterized by atomic force microscopy（ AFM） and field emission scanning electron microscopy（ FESEM）. Meanwhile

test the response characteristic to formaldehyde gas and nitrogen dioxide gas of low volume fraction at room temperature.The effect of film evaporation rate

substrate heating time and oxygen flow on the gas sensitivity is studied and analyzed.

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Study on influencing factors of graphene-based SnOx-Sn sensors gas sensitivity

DOI：10.13873/J.1000-9787(2019)08-0005-04

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Study on influencing factors of graphene-based SnO_x-Sn sensors gas sensitivity