Aiming at the problem that 700 ～ 800 times overload makes plastic deformation occurs in capacitance thin film electrode of vacuum sensor results in sensor failure. According to the theorem of momentum

damper tube in input end of the vacuum sensor and a volume of the cavity

the air mass impact time on capacitor thin film electrode delay

to achieve the purposes of protecting the capacitor thin film electrodes. By finite element simulation analysis

initially determine the distribution and arrangement of the damper orifice and the optimized vacuum sensor is tested in vacuum test device. Simulation experiment verify the effectiveness of structural optimization

and optimal arrangement of the damping fin and the matching cavity volume.