The resonant frequency of mode and quality factor of micro-electro-mechanical system（ MEMS）gyroscope have strong temperature sensitivity

which makes the output zero offset of the MEMS gyroscope drift with the temperature. In order to solve the problem of zero offset with temperature drift

a zero offset temperature compensation method based on driving resonant frequency of MEMS gyroscope as temperature benchmark is proposed. The temperature changes from-40 ℃ to 60 ℃

after measuring gyroscope zero offset with multiple cycles

relationship between zero offset and temperature variation is obtained

on this basis

zero offset is modeling and analyzed. Using the linear relationship between the resonant frequency and temperature

the real-time temperature compensation of the gyro zero bias is carried out

using resonant frequency of drive mode as temperature reference. The experimental results show that the power zero offset stability is changed from the143. 81°/h before compensation to the 26. 51°/h after compensation

which is reduced by 5. 42 times; When the temperature changes from-40 ℃ to 60 ℃

the stability of zero offset before and after compensation is1 368. 05°/h and 62. 86°/h

respectively

which is a 22-fold decrease.