Research and fabrication of thin-film thermocouples for aeroengine

YANG Ke; JIANG Hong-chuan; ZHAO Xiao-hui

doi:10.13873/J.1000-9787(2019)04-0082-04

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Research and fabrication of thin-film thermocouples for aeroengine

更新时间：2025-09-11

- Research and fabrication of thin-film thermocouples for aeroengine
- Issue 4, Pages: 82-85(2019)
- 作者机构：
  
  1. 中国航发四川燃气涡轮研究院
  2. 电子科技大学电子薄膜与集成器件国家重点实验室
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2019)04-0082-04
  CLC： V232
- Published：2019
- 稿件说明：
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YANG Ke, JIANG Hong-chuan, ZHAO Xiao-hui. Research and fabrication of thin-film thermocouples for aeroengine[J]. 2019, (4): 82-85.
DOI：

YANG Ke, JIANG Hong-chuan, ZHAO Xiao-hui. Research and fabrication of thin-film thermocouples for aeroengine[J]. 2019, (4): 82-85. DOI： 10.13873/J.1000-9787(2019)04-0082-04.

摘要

针对航空发动机涡轮叶片表面温度测试的迫切需求

采用薄膜沉积工艺

能够在Ni基高温合金表面制备热电性能较好的中温K型（NiCr/NiSi

600℃）、高温R型（Pt—13%Rh/Pt

900℃）、超高温（ITON/Pt

1 100℃; In ON/ITON

> 1 200℃）等薄膜热电偶。薄膜热电偶由NiCr Al Y过渡层、热生长Al

层、Al

绝缘层、功能层和Al

保护层构成。通过静态标定结果分析

其塞贝克系数分别达到38. 26

10. 60

78. 60

123. 10μV/℃

在恶劣环境下具有良好的稳定性和一致性

使用寿命均大于10 h。

Abstract

Aiming at the urgent need for surface temperature test of aeroengine turbine blade

K-type（ NiCr/NiSi

600 ℃）

R-type（ Pt-13 % Rh/Pt

900 ℃）

ITON/Pt（

1 100 ℃） and ION/ITON（ > 1 200 ℃） thin film thermocouples with improved thermoelectric properties on the surface of Ni-based alloy by thin films deposition technology are fabricated. Thin film thermocouples are composed of NiCrAlY buffer layer

thermal grown Al

layer

insulating layer

functional layer and Al

protecting layer. Analysis on results of static calibration show that the Seebeck coefficients are 38. 26

10. 60

78. 60

and 123. 10 μV/℃

respectively. These thin film thermocouples also have good stability and consistency in the harsh environment

and the service life of thin film thermocouples is longer than 10 h.

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Related Institution

Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University

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