Aiming at the problem that comparing with conventional cantilever probe

although MEMS-based I~2 shaped atomic force microscope（ AFM） probe has many advantages

piezo-resistive detection design does not consider strain distribution of structure

which results in detection sensitivity has a gap

compared with cantilever probe

by investigating of strain distribution of I~2 shaped probe

realize optimization design of probe structure.Experimental results show that in the premise of same structure and same input

force sensitivity of probe after improvement reach 28. 9 pN/Hz

1/2

which improved 10 times. By further improvement

force sensitivity hopefully meet the commercial requirement(

<

10 pN/Hz

1/2

).