High-order self-excited vibration and numerical simulation of electrostatic micro-actuator

CHEN Yun-fei; QI Ming-jing

doi:10.13873/J.1000-9787(2019)01-0004-03

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High-order self-excited vibration and numerical simulation of electrostatic micro-actuator

更新时间：2025-09-11

- High-order self-excited vibration and numerical simulation of electrostatic micro-actuator
- Vol. 38, Issue 1, Pages: 4-6(2019)
- 作者机构：
  
  1. 北京航空航天大学能源与动力工程学院
  2. 加州大学伯克利分校机械工程系
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2019)01-0004-03
  CLC： TH-39
- Published：2019
- 稿件说明：
移动端阅览
[1]陈筠菲,漆明净.静电微驱动器的高阶自激振动与数值仿真[J].传感器与微系统,2019,38(01):4-6.

CHEN Yun-fei, QI Ming-jing. High-order self-excited vibration and numerical simulation of electrostatic micro-actuator[J]. 2019, 38(1): 4-6.
[1]陈筠菲,漆明净.静电微驱动器的高阶自激振动与数值仿真[J].传感器与微系统,2019,38(01):4-6. DOI： 10.13873/J.1000-9787(2019)01-0004-03.

CHEN Yun-fei, QI Ming-jing. High-order self-excited vibration and numerical simulation of electrostatic micro-actuator[J]. 2019, 38(1): 4-6. DOI： 10.13873/J.1000-9787(2019)01-0004-03.

摘要

相较于传统静电微驱动器

基于自激振动的静电微驱动器具有输出位移更大的优点

并且工作过程中出现高阶振动现象。为了对高阶振动进行研究

对其进行数值仿真。根据驱动器中的悬臂梁是否与电极发生接触

悬臂梁的振动被分成两个阶段。当悬臂梁与电极发生碰撞时

利用动量平衡法建立碰撞模型。当悬臂梁在电极之间振动时

利用欧拉—伯努利梁的弯曲方程求解。通过MATLAB的数值方法求解控制方程

计算不同时刻的挠度—位置曲线。数值仿真求解得到的振型与试验中观察到的对应相同

数值仿真中也观察到了试验中出现的频率跳跃现象。

Abstract

Compared with traditional electrostatic micro-actuator

electrostatic micro-actuator based on self-excited vibration has advantage of larger output displacement and high-order vibration is observed in working. In order to research on high-order vibration

numerical simulation is conducted. According to whether cantilever in actuator contacts with electrodes

the vibration of cantilever is divided into two phases. When impact between cantilever and electrodes occur

the momentum balance method is applied to construct model. When cantilever vibrates between electrodes

bending equations of Euler-Bernoulli beam is used for solution. Control equation is solved using the numerical method through MATLAB

deflection-position curves at different moments of time are calculated. The oscillation mode solved by numerical simulation is corresponding to experiment. The frequency jumps is also observed in numerical simulation just as occurred in experiment.

关键词

Keywords

references

MEMS执行机构在微小力传感器量值溯源中的应用 [J]. 徐立,郑培亮,李闯,黄振宇,李倩. 传感器与微系统 . 2016(11)

微驱动器的原理与应用 [J]. 宫峰飞. 电子元件与材料 . 2003(06)

Frequency response of primary resonance of electrostatically actuated CNT cantilevers [J] . Dumitru I. Caruntu,Le Luo. Nonlinear Dynamics . 2014 (3)

3-D inviscid self-excited vibrations of a blade row in the last stage turbine [J] . Journal of Fluids and Structures . 2007 (6)

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