A micro-electro-mechanical system（ MEMS） structure mechanical model is constructed

analyze on fundamental reason how the transverse output produced. Based on piezoresistive effect

take full advantage of symmetrical structure and bucking effect of the Wheatstone bridge to restrain transverse output. The 100 gnchip is fabricated using MEMS bulk micromachining process. Sensitive axis deviation brought in fabrication packaging

and testing is discussed

and solution is proposed. The sample test result shows transverse sensitivity ratio can reach1 %

which can meet application requirements in fields such as national defense

automobile

industry and consumer electronics.