Research progress of SiC micro-fabrication process and its application in high-temperature capacitive pressure sensor

YU Kai-qing; CHENG Ping; DING Gui-fu; Roya MABOUDIAN; ZHAO Xiao-lin; YAO Jing-yuan

doi:10.13873/J.1000-9787(2018)12-0001-04

Chinese

您当前的位置：

首页 >

文章列表页 >

Research progress of SiC micro-fabrication process and its application in high-temperature capacitive pressure sensor

更新时间：2025-09-11

- Research progress of SiC micro-fabrication process and its application in high-temperature capacitive pressure sensor
- Issue 12, Pages: 1-4+12(2018)
- 作者机构：
  
  1. 上海交通大学微米/纳米加工技术重点实验室
  2. 上海交通大学电子信息与电气工程学院微纳电子学系
  3. 美国加州大学伯克利分校伯克利传感器与执行器中心
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2018)12-0001-04
  CLC： TP212
- Published：2018
- 稿件说明：
移动端阅览
YU Kai-qing, CHENG Ping, DING Gui-fu, et al. Research progress of SiC micro-fabrication process and its application in high-temperature capacitive pressure sensor[J]. 2018, (12): 1-4+12.
DOI：

YU Kai-qing, CHENG Ping, DING Gui-fu, et al. Research progress of SiC micro-fabrication process and its application in high-temperature capacitive pressure sensor[J]. 2018, (12): 1-4+12. DOI： 10.13873/J.1000-9787(2018)12-0001-04.

摘要

综述了碳化硅(SiC)材料的薄膜沉积、刻蚀、减薄、键合、欧姆接触等微加工工艺

并以SiC高温电容压力传感器为典型应用

介绍了SiC高温压力传感器的研究现状。

Abstract

Micromachining technique of thin-film deposition

etching

thinning

bonding

and ohmic contact of silicon carbide（ Si C） materials are reviewed. The research status of high temperature capacutuve pressure sensors based on Si C is introduced

taking Si C high temperature capacitive pressure sensor for a typical application.

关键词

Keywords

references

Views

603

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Effect of high temperature on electromagnetic ultrasonic detection and its compensation algorithm

Design of high temperature resistant rotating speed sensor

Study on high temperature speed rotating sensor fabricated by casting and co-sintering

Metallic multi-ring disc resonator MEMS micro-gyroscope and its micromachining technology

Research progress on application of SAW sensors in high temperature field

Related Author

YUE Yonggang

XU Yangyang

SUN Xingtao

WANG Haisheng

HUO Feng

WANG Yaping

ZHANG Xian

JIANG Jing

Related Institution

Inner Mongolia EHV Power Supply Bureau

State Key Laboratory of Fluid Power and Mechatronic Systems,Zhejiang University

Institute of Advanced Digital Technologs and Instrumentation,Zhejiang University

The 49th Research Institute of China Electronics Technology Group Corporation

Department of Micro-Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University

⁰