Research on performance comparison of high cost and low cost MEMS accelerometers

DU Shao-lin; CHEN Peng-guang; CHEN Shu-zhao; ZENG Chun-hua; CHEN Jian-ming

doi:10.13873/J.1000-9787(2018)04-0048-03

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Research on performance comparison of high cost and low cost MEMS accelerometers

更新时间：2025-09-11

- Research on performance comparison of high cost and low cost MEMS accelerometers
- Issue 4, Pages: 48-50(2018)
- 作者机构：
  
  昆明理工大学理学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2018)04-0048-03
  CLC： TH824.4;TP212
- Published：2018
- 稿件说明：
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DU Shao-lin, CHEN Peng-guang, CHEN Shu-zhao, et al. Research on performance comparison of high cost and low cost MEMS accelerometers[J]. 2018, (4): 48-50.
DOI：

DU Shao-lin, CHEN Peng-guang, CHEN Shu-zhao, et al. Research on performance comparison of high cost and low cost MEMS accelerometers[J]. 2018, (4): 48-50. DOI： 10.13873/J.1000-9787(2018)04-0048-03.

摘要

受微加工技术的限制

微机电系统(MEMS)加速度计在精度和可靠性方面存在劣势

针对这一问题

基于Allan方差分析法

对高成本和低成本的两种MEMS加速度计进行了实测和分析

得到了5项噪声系数

对两种传感器的性能进行了评估和对比

验证了Allan方差方法应用于加速度计误差辨识的可行性

并为加速度计的使用和研究提供了依据。

Abstract

Because of the limitations of micro-maching technology

micro-electro-mechanical system（MEMS）accelerometer has disadvantage in precision and reliability

aiming at this problem

high cost and low cost MEMS accelerometers are measured and analyzed based on Allan variance analysis method

five noise coefficients are obtained

performance of two kinds of sensors are evaluated and compared. The feasibility of applying Allan variance method to error identification of accelerometer is verified

and provide basis for application and research of accelerometer.

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