Review of principle and application of surface acoustic wave sensors

PAN Xiao-shan; LIU Rui-tong; WANG Qin; LI Gong-yan

doi:10.13873/J.1000-9787(2018)04-0001-04

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Review of principle and application of surface acoustic wave sensors

更新时间：2025-09-11

- Review of principle and application of surface acoustic wave sensors
- Issue 4, Pages: 1-4(2018)
- 作者机构：
  
  1. 中国科学院微电子研究所
  2. 国网辽宁省电力有限公司电力科学研究院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2018)04-0001-04
  CLC： TP212
- Published：2018
- 稿件说明：
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PAN Xiao-shan, LIU Rui-tong, WANG Qin, et al. Review of principle and application of surface acoustic wave sensors[J]. 2018, (4): 1-4.
DOI：

PAN Xiao-shan, LIU Rui-tong, WANG Qin, et al. Review of principle and application of surface acoustic wave sensors[J]. 2018, (4): 1-4. DOI： 10.13873/J.1000-9787(2018)04-0001-04.

摘要

详细论述了声表面波传感器的工作模式、工作原理;结合目前声表面波传感器的发展状况

详细论述了声表面波在智能变电站、电力设备、列车、湿度检测以及在复杂多变环境中的应用;对声表面波传感器的发展给出了展望。

Abstract

Operating mode and operating principle of surface acoustic wave（SAW） sensors are discussed in detail.Application of SAW in field of intelligent substation

electrical equipment

train

humidity detection

and in complex variable environments are reviewed in details.Outlook of development of SAW sensors is briefly discussed.

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