A new type of silicon on insulator（ SOI） high sound pressure noise sensor is introduced. Design process of sound sensitive membrane structure which improves key indicators of noise sensor is mainly simulated and calculated. The designed size is simulated with ANSYS software. Frequency response test and linearity test of the designed noise sensor is carried out. Linearity of high sound pressure level at range of 135

200 d B dynamic scope is less than 1 %

frequency response at range of 20

100 000 Hz

working temperature range of-40 ~260 ℃

output of the sensor is standard voltage signal

which can be composed of passive acoustic measurement array

and used to measure high sound pressure level of noise signal.