Parameters optimization design and experiments of planar capacitive sensor

ZHAN Zheng; HUANG Yun-zhi; LI Ke

doi:10.13873/J.1000-9787(2017)12-0095-03

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Parameters optimization design and experiments of planar capacitive sensor

更新时间：2025-09-11

- Parameters optimization design and experiments of planar capacitive sensor
- Vol. 36, Issue 12, Pages: 95-97+101(2017)
- 作者机构：
  
  合肥工业大学电气与自动化工程学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2017)12-0095-03
  CLC： TP212
- Published：2017
- 稿件说明：
移动端阅览
[1]詹争,黄云志,李柯.平面电容传感器参数优化设计及实验[J].传感器与微系统,2017,36(12):95-97+101.

ZHAN Zheng, HUANG Yun-zhi, LI Ke. Parameters optimization design and experiments of planar capacitive sensor[J]. 2017, 36(12): 95-97+101.
[1]詹争,黄云志,李柯.平面电容传感器参数优化设计及实验[J].传感器与微系统,2017,36(12):95-97+101. DOI： 10.13873/J.1000-9787(2017)12-0095-03.

ZHAN Zheng, HUANG Yun-zhi, LI Ke. Parameters optimization design and experiments of planar capacitive sensor[J]. 2017, 36(12): 95-97+101. DOI： 10.13873/J.1000-9787(2017)12-0095-03.

摘要

平面电容传感器的性能指标由结构参数决定

如何优化结构参数使传感器达到良好的性能是传感器设计的关键。基于三维有限元仿真模型

研究了感应面积一定的条件下

电极对数、电极宽度与间距比对传感器信号强度、灵敏度及穿透深度的影响。采用神经网络方法优化结构参数

在保证穿透深度的条件下

获得较好的信号强度。研制了不同结构参数的PCB型平面电容传感器

并将其用于介电材料检测

实验结果证明了传感器参数优化测量的有效性。

Abstract

The performance indexes of coplanar capacitive sensor are determined by its structure parameters. It is very important for sensor design to optimize parameters. Based on three-dimensional finite element simulation model

effect of electrode width

electrode space ration and electrode numbers on signal strength

sensitivity

penetration depth is studied. The neural network is applied to optimize structure parameters

the signal strength is improved with the enough penetration depth. The sensors with different structure parameters are fabricated on PCB for dielectric material measurement. The experiments verify the effectivity of parameters optimization measurement.

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Keywords

references

平面电容传感器设计及在材料探伤中的应用研究 [J]. 汪蓓蓓,黄云志,刘永洪. 传感技术学报 . 2014(07)

多波长边缘电场传感器参数估计算法的研究 [J]. 黄云志,张慧凤,汪蓓蓓. 传感技术学报 . 2013(01)

同面多电极电容传感器结构仿真研究 [J]. 曹河,董恩生,范作宪,庞宇. 传感器与微系统 . 2012(12)

平面电容传感器在探测材料损伤中的研究 [J]. 谢宁宁,陈向东,李晓钰,宋濛. 半导体技术 . 2011(07)

三电极平面电容传感器对材料损伤的探测 [J]. 谢宁宁,陈向东,李晓钰. 传感器与微系统 . 2011(04)

基于有限元的电容临近传感器研究 [J]. 李晓钰,陈向东,姚尧,谢睿. 传感器与微系统 . 2010(08)

人工神经网络和遗传算法在微带交指电容器设计中的应用 [J]. 张欣,陈如山. 微波学报 . 2003(04)

Planar capacitive sensors - designs and applications [J] . Hu, Xiaohui,Yang, Wuqiang. Sensor Review . 2010 (1)

Coplanar capacitance sensors for detecting water intrusion in composite structures [J] . Amr A Nassr,Wael H Ahmed,Wael W El-Dakhakhni. Measurement Science and Technology . 2008 (7)

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