Design and analysis of ceramic sealed structure of silicon-on-sapphire absolute pressure sensor

YAO Dong-yuan; XIA Hang; WANG Jun-wei; XIE Sheng-qiu

doi:10.13873/J.1000-9787(2017)08-0065-04

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Design and analysis of ceramic sealed structure of silicon-on-sapphire absolute pressure sensor

更新时间：2025-09-11

- Design and analysis of ceramic sealed structure of silicon-on-sapphire absolute pressure sensor
- Vol. 36, Issue 8, Pages: 65-68(2017)
- 作者机构：
  
  中国电子科技集团公司第四十九研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2017)08-0065-04
  CLC： TP212
- Published：2017
- 稿件说明：
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[1]姚东媛,夏航,王俊巍,谢胜秋.硅-蓝宝石绝压传感器陶瓷密封结构设计与分析[J].传感器与微系统,2017,36(08):65-68.

YAO Dong-yuan, XIA Hang, WANG Jun-wei, et al. Design and analysis of ceramic sealed structure of silicon-on-sapphire absolute pressure sensor[J]. 2017, 36(8): 65-68.
[1]姚东媛,夏航,王俊巍,谢胜秋.硅-蓝宝石绝压传感器陶瓷密封结构设计与分析[J].传感器与微系统,2017,36(08):65-68. DOI： 10.13873/J.1000-9787(2017)08-0065-04.

YAO Dong-yuan, XIA Hang, WANG Jun-wei, et al. Design and analysis of ceramic sealed structure of silicon-on-sapphire absolute pressure sensor[J]. 2017, 36(8): 65-68. DOI： 10.13873/J.1000-9787(2017)08-0065-04.

摘要

介绍了硅-蓝宝石绝压传感器中氧化铝陶瓷-钛合金的真空密封参考腔小型化结构设计

探讨了异质材料不匹配引起的陶瓷断裂问题

对陶瓷-钛合金封装结构的应力情况进行了计算和分析

通过中间缓冲层设计、减小陶瓷承受的结构残余应力

消除了由陶瓷断裂导致的密封失效;选择热胀系数相近的可伐中间层材料

对比不同厚度缓冲层产生的残余应力

优化中间层结构

采用LTCC加工技术与真空钎焊工艺结合制作了陶瓷-可伐-钛合金密封组件

并通过了高、低温度试验考核:组件密封漏率小于1×10

-10

Pa·m

密封可靠

满足绝压传感器使用寿命的要求。

Abstract

The minimized structure design of alumina ceramic-titanium alloy vacuum sealed reference cavity in silicon-on sapphire（ SOS） absolute pressure sensor is introduced. The problem of ceramic fracture caused by mismatch of heterogeneous material is discussed. The stress situation of ceramic-titanium alloy packaging structure is calculated and analyzed. The residual stress of ceramic structure is reduced through the design of intermediate buffer layer

the ceramic seal failure caused by ceramic breakage is removed. Kovar material with the similar thermal expansion coefficient is selected as the middle layer. The middle layer structure is optimized by comparing the residual stress generated by the different thic

kness buffer layer. LTCC processing technology and vacuum brazing process are used to make the ceramic-kovar-titanium alloy sealing components. The component passes the high and low temperature test

and the leaking rate is less than 1 × 10

-10

Pa· m

it is sealed and reliable

which meets the life requirement of working life of the absolute pressure sensor.

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Keywords

references

Al 2 O 3 陶瓷与可伐合金钎焊的研究进展 [J]. 宋庭丰,蒋小松,莫德锋,沈一璋,朱德贵. 电焊机 . 2017(04)

硬质合金钎焊技术的现状与发展 [J]. 罗蒙丽. 硬质合金 . 2015(02)

银铜基钎料的安装钎焊工艺研究 [J]. 陈娜,卢威. 热加工工艺 . 2013(03)

绝压传感器中陶瓷/钛合金焊接技术研究 [J]. 崔光浩,邹向光,秦占胜. 传感器与微系统 . 2010(02)

钛合金及应用[M]. 化学工业出版社 , 张喜燕,赵永庆,白晨光编著, 2005

新编传感器技术手册[M]. 国防工业出版社 , 李科杰主编, 2002

Structural role and coordination environment of Fe in Fe 2 O 3 –PbO–SiO 2 –Na 2 O composite glasses [J] . F. Pinakidou,M. Katsikini,P. Kavouras,F. Komninou,Th. Karakostas,E.C. Paloura. Journal of Non-Crystalline Solids . 2007 (2)

Synthesis and properties of copper conductive adhesives modified by SiO 2 nanoparticles [J] . Hongsheng Zhao,Tongxiang Liang,Bing Liu. International Journal of Adhesion and Adhesives . 2006 (6)

Principles and phenomena of bioengineering with glass-ceramics for dental restoration [J] . Journal of the European Ceramic Society . 2006 (2)

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