Greatly affected by the environment in which the most obvious effect of temperature. In order to eliminate influence of ambient temperature on output of silicon piezoresistive sensor

greatly enhance measurement precision of piezoresistive silicon sensor

sensor chip and heat source and temperature-sensitive components are packaged together

by controlling heating mode

sensor can work in environment of constant 50 ℃ and linear calibration and testing are carried out. At-45

45 ℃ temperature measurement error of air pressure sensor system is less than 0. 3 h Pa at range of 600

1 100 h Pa.