Study of main failure modes and failure mechanisms of MEMS inertial devices

CHEN Jun-guang; GU Zhuan-yuan; HE Chun-hua; HUANG Qin-wen; LAI Ping; EN Yun-fei

doi:10.13873/J.1000-9787(2017)03-0001-05

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Study of main failure modes and failure mechanisms of MEMS inertial devices

更新时间：2025-09-11

- Study of main failure modes and failure mechanisms of MEMS inertial devices
- Vol. 36, Issue 3, Pages: 1-5+13(2017)
- 作者机构：
  
  1. 工业和信息化部电子第五研究所电子元器件可靠性物理及其应用技术重点实验室
  2. 广东工业大学自动化学院
  3. 华南理工大学电子与信息学院
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2017)03-0001-05
  CLC： TH-39
- Published：2017
- 稿件说明：
移动端阅览
[1]陈俊光,谷专元,何春华,黄钦文,来萍,恩云飞.MEMS惯性器件的主要失效模式和失效机理研究[J].传感器与微系统,2017,36(03):1-5+13.

CHEN Jun-guang, GU Zhuan-yuan, HE Chun-hua, et al. Study of main failure modes and failure mechanisms of MEMS inertial devices[J]. 2017, 36(3): 1-5+13.
[1]陈俊光,谷专元,何春华,黄钦文,来萍,恩云飞.MEMS惯性器件的主要失效模式和失效机理研究[J].传感器与微系统,2017,36(03):1-5+13. DOI： 10.13873/J.1000-9787(2017)03-0001-05.

CHEN Jun-guang, GU Zhuan-yuan, HE Chun-hua, et al. Study of main failure modes and failure mechanisms of MEMS inertial devices[J]. 2017, 36(3): 1-5+13. DOI： 10.13873/J.1000-9787(2017)03-0001-05.

摘要

针对微机电系统（MEMS）器件的可靠性问题

通过大量的历史资料调研和失效信息收集等方法

针对微机电系统（MEMS）器件的可靠性问题

对冲击、振动、湿度、温变、辐照和静电放电（ESD）等不同环境应力条件下的MEMS惯性器件典型失效模式及失效机理进行了深入分析和总结

研究结果有利于指导未来MEMS惯性器件的失效分析和可靠性设计。

Abstract

Reliability of MEMS inertial devices seriously affects the defense security and restricts the application.Aiming at typical application environments

such as shock

vibration

humidity

temperature

radiation and electrostatic discharge（ ESD）

typical failure modes and mechanisms of MEMS inertial devices are detailed analyzed and summed up and research results will benefit failure analysis and reliability design of MEMS inertial devices.

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Keywords

references

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