Research of temperature controlling module of micro thermal conductivity detector

YOU Wen-bin; FENG Fei; YU Zheng-yin; GE Xiao-hong; LIU Ming; LI Xin-xin

doi:10.13873/J.1000-9787(2017)02-0011-03

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Research of temperature controlling module of micro thermal conductivity detector

更新时间：2025-09-11

- Research of temperature controlling module of micro thermal conductivity detector
- Vol. 36, Issue 2, Pages: 11-13+17(2017)
- 作者机构：
  
  1. 中国科学院上海微系统与信息技术研究所
  2. 中国科学院大学
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2017)02-0011-03
  CLC： TH833
- Published：2017
- 稿件说明：
移动端阅览
[1]游文斌,冯飞,俞正寅,戈肖鸿,刘明,李昕欣.微型热导检测器温控模块研究[J].传感器与微系统,2017,36(02):11-13+17.

YOU Wen-bin, FENG Fei, YU Zheng-yin, et al. Research of temperature controlling module of micro thermal conductivity detector[J]. 2017, 36(2): 11-13+17.
[1]游文斌,冯飞,俞正寅,戈肖鸿,刘明,李昕欣.微型热导检测器温控模块研究[J].传感器与微系统,2017,36(02):11-13+17. DOI： 10.13873/J.1000-9787(2017)02-0011-03.

YOU Wen-bin, FENG Fei, YU Zheng-yin, et al. Research of temperature controlling module of micro thermal conductivity detector[J]. 2017, 36(2): 11-13+17. DOI： 10.13873/J.1000-9787(2017)02-0011-03.

摘要

作为微型气相色谱仪（Micro GC）的关键部件的微型热导检测器（Micro TCD）

其噪声主要来自于温度波动和气流抖动等因素。从理论上分析了Micro TCD噪声的主要来源

使用COMSOL仿真得到了温度波动对系统噪声的影响

并详述了Micro TCD加热模块的电路部分和算法部分。测试表明:Micro TCD的温度波动约为0.09℃

达到了商用GC控温精度的标准。

Abstract

The main noise of micro thermal conductivity detector（ micro TCD）

the key part of micro gas chromatograph（ GC） system

comes from temperature fluctuation and gas flow noise. Main sources of micro TCD noise is theoretically analyzed

effect of temperature fluctuations on the micro TCD noise is simulated with COMSOL

and electric circuit and the algorithm of the heating module is described in details. Test show that temperature fluctuations of micro TCD is about 0. 09 ℃

which reach standard of commercial GC temperature control precision.

关键词

Keywords

references

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