Measurement precision of silicon micro-gyroscope is determined by sensitive capacitor readout circuit.Through modeling analysis on sensive capacitor readout circuit

use differential modulation technology to realize low noise signal output. A charge readout circuit which can suppress low frequency noise and high sensitivity is optimally designed in parameter and PCB. Esperimental results indicate that output noise of the circuit is-116. 24 dB V/Hz

1/2

and sensitive capacitor detecting resolution is 1. 16 × 10-19 F/Hz

1/2

.