Design of electrostatic comb driver used for adjustable GaN micro mirror

LIU Xin; WANG Yong-jin; HU Fang-ren

doi:10.13873/J.1000-9787(2017)01-0095-03

Chinese

您当前的位置：

首页 >

文章列表页 >

Design of electrostatic comb driver used for adjustable GaN micro mirror

更新时间：2025-09-11

- Design of electrostatic comb driver used for adjustable GaN micro mirror
- Vol. 36, Issue 1, Pages: 95-97+104(2017)
- 作者机构：
  
  1. 南京邮电大学光电工程学院
  2. 南京邮电大学Peter Grünberg研究中心
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2017)01-0095-03
  CLC： TH703
- Published：2017
- 稿件说明：
移动端阅览
[1]刘昕,王永进,胡芳仁.用于硅基氮化镓可调微镜的静电梳齿型微驱动器设计[J].传感器与微系统,2017,36(01):95-97+104.

LIU Xin, WANG Yong-jin, HU Fang-ren. Design of electrostatic comb driver used for adjustable GaN micro mirror[J]. 2017, 36(1): 95-97+104.
[1]刘昕,王永进,胡芳仁.用于硅基氮化镓可调微镜的静电梳齿型微驱动器设计[J].传感器与微系统,2017,36(01):95-97+104. DOI： 10.13873/J.1000-9787(2017)01-0095-03.

LIU Xin, WANG Yong-jin, HU Fang-ren. Design of electrostatic comb driver used for adjustable GaN micro mirror[J]. 2017, 36(1): 95-97+104. DOI： 10.13873/J.1000-9787(2017)01-0095-03.

摘要

提出并设计了一种用于硅基氮化镓（Ga N）可调微镜的静电梳齿型微驱动器。利用有限元软件建立了该器件的几何结构模型

对器件的结构进行了仿真优化。此外

采用微机电系统（MEMS）加工工艺

制作出了用于硅基氮化镓可调微镜的梳齿型微驱动器

并对其驱动特性进行测试。测试结果表明:所制作的微驱动器的位移随着电压的变化呈二次方关系

与仿真结果基本一致。当加载驱动电压为200 V时

微驱动器的驱动位移可达到1.08μm。

Abstract

An electrostatic comb driver used for adjustable Ga N micro mirror is proposed and designed. By using FEM software

structure model is constructed for the device and the structure of the comb driver is simulated and optimized. Besides

fabricate comb micro driver used for Ga N-on-Si using micro-electro-mechanical system（ MEMS） process and driving characteristic of electrostatic comb driver is test. Test result demonstrates that the displacement of the driver has a quadratic relation with drive voltage which is consistent with simulation result.Drive displacement of the proposed micro actuator is 1. 08 μm under driving voltage of 200 V.

关键词

Keywords

references

一种电热式MEMS微镜多自由度模型解析方法 [J]. 章皓,徐大诚,陈巧,谢会开. 传感器与微系统 . 2014(10)

基于MEMS的微位移传感器及其应用研究 [J]. 孙凤鸣,傅星,朱振宇,高赛,张超. 传感技术学报 . 2013(02)

Low thermal resistance of a GaN-on-SiC transistor structure with improved structural properties at the interface [J] . Jr-Tai Chen,James W. Pomeroy,Niklas Rorsman,Chao Xia,Chariya Virojanadara,Urban Forsberg,Martin Kuball,Erik Janzén. Journal of Crystal Growth . 2015

Views

112

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

High-order self-excited vibration and numerical simulation of electrostatic micro-actuator

Vibration characteristics of flapping-wing micro air vehicles actuator based on electromagnetic actuation

Structure design,fabrication and testing of millimeter-scale electrostatic micro flapping-wing actuator

Related Author

CHEN Yun-fei

QI Ming-jing

ZHANG Yu

LIU Zhi-wei

YANG Yi

CHE Yun-long

Related Institution

School of Energy and Power Engineering,Beihang University

Department of Mechanical Engineering,University of California

Institute of Electrical Engineering,Chinese Academy of Sciences

⁰