Design of resonant MEMS magnetic sensor interface circuit

GAO Hua-lei; XU De-hui; LIU Song; MA Ying-lei; XIONG Bin

doi:10.13873/J.1000-9787(2016)11-0087-03

Chinese

您当前的位置：

首页 >

文章列表页 >

Design of resonant MEMS magnetic sensor interface circuit

更新时间：2025-09-11

- Design of resonant MEMS magnetic sensor interface circuit
- Vol. 35, Issue 11, Pages: 87-89+93(2016)
- 作者机构：
  
  中国科学院上海微系统与信息技术研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2016)11-0087-03
  CLC： TP212
- Published：2016
- 稿件说明：
移动端阅览
[1]高华磊,徐德辉,刘松,马颖蕾,熊斌.谐振式MEMS磁传感器接口电路设计[J].传感器与微系统,2016,35(11):87-89+93.

GAO Hua-lei, XU De-hui, LIU Song, et al. Design of resonant MEMS magnetic sensor interface circuit[J]. 2016, 35(11): 87-89+93.
[1]高华磊,徐德辉,刘松,马颖蕾,熊斌.谐振式MEMS磁传感器接口电路设计[J].传感器与微系统,2016,35(11):87-89+93. DOI： 10.13873/J.1000-9787(2016)11-0087-03.

GAO Hua-lei, XU De-hui, LIU Song, et al. Design of resonant MEMS magnetic sensor interface circuit[J]. 2016, 35(11): 87-89+93. DOI： 10.13873/J.1000-9787(2016)11-0087-03.

摘要

介绍了一种谐振式微系统（MEMS）磁传感器的接口电路

电路由驱动电路和信号检测处理电路组成。驱动电路采用直接数字频率合成器（DDS）产生磁传感器驱动信号

同时为检测电路提供同步信号;信号检测处理电路对磁传感器输出信号和DDS产生的同步信号进行同步解调

最终得到所需的磁场信号。最后对电路的性能和测试结果进行分析和总结。

Abstract

An interface circuit for resonant MEMS magnetic sensor is introduced

the circuit is composed of driving circuit and signal detection and processing circuit. Driving circuit uses direct digital frequency synthesizer（ DDS） to generate magnetic sensor driving signal. At the same time

it provides synchronizing signal for detection circuit. Signal detection and processing circuit demodulates output signal of magnetic sensor and synchronizing signal generated by DDS. Finally

magnetic field signal needed is obtained. Characteristics of circuit and results of test are analyzed.

关键词

Keywords

references

一种推挽驱动的微型磁传感器设计 [J]. 徐华英,徐德辉,熊斌,毕勤,王东平. 传感器与微系统 . 2015(09)

谐振式MEMS磁强计原理与研究进展 [J]. 任大海,阎梅芝,尤政. 传感器与微系统 . 2007(11)

MEMS磁场传感器的研究进展 [J]. 陈洁,黄庆安,秦明. 电子器件 . 2006(04)

微机械振动式陀螺接口电路设计与实现 [J]. 陈懿,金仲和,王慧泉,焦纪伟,王跃林. 仪器仪表学报 . 2005(07)

Views

133

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

Design of PLL for interface circuit of resonant micro-cantilever beam

Interface circuit design for nanomaterial gas sensor

Design of an integrated acceleration sensor for passive RFID application

Research on application of CAN bus in real-time broken rail detecting system*

Related Author

ZHAO Ye

HUAN Dinglai

LIU Xinghui

FENG Jiajie

ZHAO Hongliang

ZHANG Bo

MA Hongli

ZHANG Yafei

Related Institution

School of Physics, Liaoning University

Institute of Microelectronics, Chinese Academy of Sciences

North China University of Technology

Key Laboratory of Thin Film and Microfabrication Technology,Ministry of Education,Department of Micro/Nano Electronics,School of Electronic Information and Electrical Engineering,Shanghai Jiao Tong University

School of Railway Tracks and Transportation,East China Jiao Tong University

⁰