Fabrication and performance study of high temperature thin film sensor

WANG Qiang; ZHANG Jiu-bin; SHAO Jing; CHENG Ping; DING Gui-fu; DUAN Li

doi:10.13873/J.1000-9787(2016)11-0033-03

Chinese

您当前的位置：

首页 >

文章列表页 >

Fabrication and performance study of high temperature thin film sensor

更新时间：2025-09-11

- Fabrication and performance study of high temperature thin film sensor
- Vol. 35, Issue 11, Pages: 33-35+39(2016)
- 作者机构：
  
  1. 上海中航商用航空发动机制造有限责任公司
  2. 上海交通大学电子信息与电子工程学院微纳电子学系微/纳米国家重点实验室
  3. 中航商用航空发动机有限责任公司
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2016)11-0033-03
  CLC： V23;TP212
- Published：2016
- 稿件说明：
移动端阅览
[1]王强,张久斌,邵靖,程萍,丁桂甫,段力.高温薄膜传感器制备与性能研究[J].传感器与微系统,2016,35(11):33-35+39.

WANG Qiang, ZHANG Jiu-bin, SHAO Jing, et al. Fabrication and performance study of high temperature thin film sensor[J]. 2016, 35(11): 33-35+39.
[1]王强,张久斌,邵靖,程萍,丁桂甫,段力.高温薄膜传感器制备与性能研究[J].传感器与微系统,2016,35(11):33-35+39. DOI： 10.13873/J.1000-9787(2016)11-0033-03.

WANG Qiang, ZHANG Jiu-bin, SHAO Jing, et al. Fabrication and performance study of high temperature thin film sensor[J]. 2016, 35(11): 33-35+39. DOI： 10.13873/J.1000-9787(2016)11-0033-03.

摘要

利用微机电系统（MEMS）工艺在Al

基片上制备了Pt—PtRh薄膜热电偶

其工作温度最高可达到1 300℃

最大输出电势达14.8 m V。薄膜热电偶的电势—温度曲线与标准热电偶的曲线基本重合

同时研究了不同粘结层对薄膜微结构、器件寿命的影响。实验结果表明:以Ta为粘结层时薄膜传感器的寿命最长

在1 300℃下可达到14 h。

Abstract

Pt-PtRh thin film thermocouples（ TFTCs） are fabricated on Al

substrate by micro-electromechanical system（ MEMS） technology. Its operating temperature is up to 1300℃. The maximum thermoelectric voltage of TFTCs is 14. 8 m V. Its V-T curve is in accordance with that of standard thermocouple approximately.Effect of different adhesion layer materials on micro-structure of TFTCs and lifetime of device are studied. The film sensor with tantalum adhesion layer has the longest lifetime

which is up to 14 h at 1 300 ℃.

关键词

Keywords

references

航空发动机内壁高温测试技术 [J]. 邓进军,李凯,王云龙,金新航,马炳和. 微纳电子技术 . 2015(03)

薄膜热电偶温度传感器研究进展 [J]. 赵源深,杨丽红. 传感器与微系统 . 2012(02)

国外航空发动机薄膜热电偶技术发展研究 [J]. 黄春峰,蒋明夫,毛茂华. 航空发动机 . 2011(06)

薄膜热电偶的发展及其应用 [J]. 叶方伟. 材料导报 . 1995(05)

Fabrication and calibration of Pt–10%Rh/Pt thin film thermocouples [J] . Yinzhi Chen,Hongchuan Jiang,Wenya Zhao,Wanli Zhang,Xingzhao Liu,Shuwen Jiang. Measurement . 2014

Thin film platinum–palladium thermocouples for gas turbine engine applications [J] . Ian M. Tougas,Otto J. Gregory. Thin Solid Films . 2013

High temperature materials for thin-film thermocouples on silicon wafers [J] . Kenneth G Kreider,Greg Gillen. Thin Solid Films . 2000 (1)

Platinum/palladium thin-film thermocouples for temperature measurements on silicon wafers [J] . Kenneth G. Kreider,Frank DiMeo. Sensors & Actuators: A. Physical . 1998 (1)

Views

353

下载量

CSCD

Alert me when the article has been cited

提交

Tools

Publicity Resources

A novel MEMS temperature sensor

Preparation and study of high-temperature characteristic of platinum resistor thin-film temperature sensor

Development trend of flexible temperature sensors technology

Research on potential applications of SAW sensors in automotive electronics

Design of high precision temperature sensor for seawater temperature measurement

Related Author

SHI Zi-qing1

CHEN Xiang-dong1

GONG Jing1

LI Xiu-mei2

ZHEN Chengwei

LI Shuang

SHI Nanyue

DONG Helei

Related Institution

School of Information Science & Technology,Southwest Jiaotong University

School of Physical Science and Technology,Southwest Jiaotong University

Key Laboratory of Micro/Nano Devices and Systems,Ministry of Education,North University of China,Taiyuan

Key Laboratory of Instrumentation Science and Dynamic Measurement,Ministry of Education,North University of China

The 49th Research Institute of China Electronics Technology Group Corporation

⁰