Micro motion simulation analysis of quartz pendulum in flexible accelerometer

LIAN De-hao; LI Qiang; SUN Fei; CHEN Xue-dong

doi:10.13873/J.1000-9787(2016)11-0015-04

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Micro motion simulation analysis of quartz pendulum in flexible accelerometer

更新时间：2025-09-11

- Micro motion simulation analysis of quartz pendulum in flexible accelerometer
- Vol. 35, Issue 11, Pages: 15-18(2016)
- 作者机构：
  
  1. 西南科技大学信息工程学院
  2. 中国工程物理研究院电子工程研究所
- 作者简介：
- 基金信息：
- DOI：10.13873/J.1000-9787(2016)11-0015-04
  CLC： TH824.4
- Published：2016
- 稿件说明：
移动端阅览
[1]连德浩,李强,孙飞,陈雪冬.挠性加速度计石英摆片的微运动仿真分析[J].传感器与微系统,2016,35(11):15-18.

LIAN De-hao, LI Qiang, SUN Fei, et al. Micro motion simulation analysis of quartz pendulum in flexible accelerometer[J]. 2016, 35(11): 15-18.
[1]连德浩,李强,孙飞,陈雪冬.挠性加速度计石英摆片的微运动仿真分析[J].传感器与微系统,2016,35(11):15-18. DOI： 10.13873/J.1000-9787(2016)11-0015-04.

LIAN De-hao, LI Qiang, SUN Fei, et al. Micro motion simulation analysis of quartz pendulum in flexible accelerometer[J]. 2016, 35(11): 15-18. DOI： 10.13873/J.1000-9787(2016)11-0015-04.

摘要

加速度计石英摆片的微运动仿真分析可以获取帮助提高石英挠性加速度计生产质量的技术手段和途径。从加速度计石英摆片的物理模型入手

用有限元方法对摆式加速度计的关键部件石英摆片进行静力计算与模态分析

直观地显示了石英摆片结构的应力场与形变场

获得了各阶自然频率和阵型。结果表明:采用有限元分析的方法能够辅助提高加速计的性能。

Abstract

The micro motion simulation analysis of accelerometer quartz pendulum can get technical method and approach to improve production quality of quartz flexible accelerometer. Starting with the research of physical model of accelerometer quartz pendulum

static calculation and modal analysis on key component quartz pendulum are carried out through the finite element method

visually display stress field and deformation field of the structure of quartz pendulum

and gain natural frequency in different orders and formation. The results indicate that the finite element method can improve the performance of accelerometer.

关键词

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references

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石英振梁加速度计静态输入输出特性 [J]. 杨挺,杨贵玉,李庆丰. 中国惯性技术学报 . 2014(03)

谐振式加速度计模型分析与仿真 [J]. 李晶,樊尚春. 传感器与微系统 . 2013(06)

石英挠性加速度计摆片组件的应力分析 [J]. 李安,张云电. 机电工程 . 2010(10)

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挠性摆式微硅加速度计的模态分析 [J]. 董景新,张自然,袁光,皮舜,吴晓春. 清华大学学报(自然科学版) . 1998(11)

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Related Institution

College of Automobile and Traffic Engineering,Nanjing Forestry University

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